US 12,259,057 B2
Fluid control device
Yutoku Kawabata, Kyoto (JP); and Nobuhira Tanaka, Kyoto (JP)
Assigned to MURATA MANUFACTURING CO., LTD., Kyoto (JP)
Filed by Murata Manufacturing Co., Ltd., Kyoto (JP)
Filed on Aug. 10, 2022, as Appl. No. 17/818,758.
Application 17/818,758 is a continuation of application No. PCT/JP2021/003549, filed on Feb. 1, 2021.
Claims priority of application No. 2020-030019 (JP), filed on Feb. 26, 2020.
Prior Publication US 2022/0381361 A1, Dec. 1, 2022
Int. Cl. F16K 31/00 (2006.01); F04B 43/04 (2006.01); F16K 99/00 (2006.01)
CPC F16K 31/005 (2013.01) [F04B 43/043 (2013.01); F04B 43/046 (2013.01); F16K 99/0015 (2013.01); F16K 99/0048 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A fluid control device comprising:
a first main plate having a first main surface and a second main surface;
a second main plate having a third main surface facing the first main surface and a fourth main surface on an opposite side from the third main surface, and having a first hole penetrating between the third main surface and the fourth main surface and through which a fluid flows;
a driving body disposed on the second main surface and causing the first main plate to vibrate;
a frame body provided at an outer side than an outer edge of the first main plate;
support portions connecting the frame body and the first main plate to each other and supporting the first main plate to allow the first main plate to vibrate relative to the frame body;
a side wall member connecting the second main plate and the frame body to each other and providing a pump chamber between the first main surface and the third main surface;
a valve member including a flexible valve film and a fixing member, the fixing member fixing an inner end side of the valve film to the first main surface, the valve member having an inner end being a fixed end and an outer end being a movable end; and
a second hole surrounded by an outer edge of the first main plate, the frame body, and two of the support portions adjacent to each other, allowing communication between an inside of the pump chamber and an outside of the pump chamber, and through which the fluid passes,
wherein an outer end of the valve member overlaps the second hole when the first main surface is seen in plan view.