US 12,258,665 B2
Substrate inspection system and a method of use thereof
Youngjin Choi, San Jose, CA (US)
Assigned to JNK TECH, San Jose, CA (US)
Filed by JNK TECH, San Jose, CA (US)
Filed on Dec. 5, 2023, as Appl. No. 18/530,033.
Application 18/530,033 is a continuation of application No. 17/656,343, filed on Mar. 24, 2022, granted, now 11,840,762.
Application 17/656,343 is a continuation of application No. 17/305,838, filed on Jul. 15, 2021, granted, now 11,286,567, issued on Mar. 29, 2022.
Application 17/305,838 is a continuation of application No. 17/345,795, filed on Jun. 11, 2021, granted, now 11,987,884.
Claims priority of provisional application 63/175,282, filed on Apr. 15, 2021.
Prior Publication US 2024/0102169 A1, Mar. 28, 2024
Int. Cl. G06K 9/00 (2022.01); C23C 16/52 (2006.01); G01N 21/88 (2006.01); G01N 21/95 (2006.01); G01N 21/958 (2006.01); G06T 1/00 (2006.01); G06T 7/00 (2017.01); G06T 7/13 (2017.01); G06T 7/174 (2017.01); H01L 21/66 (2006.01); H01L 21/68 (2006.01)
CPC C23C 16/52 (2013.01) [G01N 21/8851 (2013.01); G01N 21/9501 (2013.01); G01N 21/958 (2013.01); G06T 1/0014 (2013.01); G06T 7/0004 (2013.01); G06T 7/13 (2017.01); G06T 7/174 (2017.01); H01L 21/681 (2013.01); H01L 22/12 (2013.01); G06T 2207/30148 (2013.01)] 3 Claims
OG exemplary drawing
 
1. A method of inspecting a substrate, the method comprising:
causing, at a controller, one or more cameras to capture at least one first image of one or more portions of a substrate disposed inside a load lock chamber of a film deposition apparatus after the substrate is received from an outside of the film deposition apparatus and before the substrate is clamped by the load lock chamber;
causing, at the controller, the one or more cameras to capture at least one second image of the one or more portions of the substrate disposed inside the load lock chamber after the substrate is clamped by the load lock chamber and while the substrate remains clamped by the load lock chamber;
analyzing either or both of the at least one first image or the at least one second image to determine a displacement of the substrate with respect to a reference position in the load lock chamber;
causing, at the controller, the one or more cameras to capture at least one third image of one or more portions of a film-deposited substrate placed in the load lock chamber after the film-deposited substrate is received from a deposition chamber of the film deposition apparatus;
analyzing, at the controller, the at least one third image to determine whether a film on the film-deposited substrate has a defect or an error; and
displaying analysis results on a display,
wherein analyzing the at least one third image comprises:
analyzing edge lines and corner profiles of a deposited film in the at least one third image of the one or more portions of the film-deposited substrate, and
determining a status of at least one of parts in the deposition chamber, the status comprising an assembling status of a substrate fixture, sagging of an electrode, a flatness of susceptor or electrode, arc formation, or a gap between the electrode and the substrate fixture in the deposition chamber based on analysis of the edge lines and corner profiles of the deposited film, and
wherein the analysis results being displayed on the display comprise information on at least one of the corner profiles.