US 12,258,662 B2
Precursor delivery systems, precursor supply packages, and related methods
Paolo Moreschini, Danbury, CT (US)
Assigned to ENTEGRIS, INC., Billerica, MA (US)
Filed by ENTEGRIS, INC., Billerica, MA (US)
Filed on Aug. 26, 2022, as Appl. No. 17/896,964.
Claims priority of provisional application 63/240,185, filed on Sep. 2, 2021.
Prior Publication US 2023/0068384 A1, Mar. 2, 2023
Int. Cl. B01J 7/00 (2006.01); B01J 4/00 (2006.01); B01J 4/02 (2006.01); C23C 16/08 (2006.01); C23C 16/448 (2006.01)
CPC C23C 16/08 (2013.01) [B01J 4/008 (2013.01); B01J 4/02 (2013.01); C23C 16/4485 (2013.01); B01J 7/00 (2013.01)] 9 Claims
OG exemplary drawing
 
1. A precursor delivery system comprising:
a plurality of precursor supply packages, each of the plurality of precursor supply packages comprising:
a vessel body containing a solid precursor material, wherein the solid precursor material has a formula MPF6, wherein M is Li, Na, K, Rb, Cs, or Ag;
a heater configured to heat the vessel body to a temperature sufficient to produce a gas precursor by thermal decomposition of the solid precursor material wherein the gas precursor comprises PF5; and
an outlet fluidly connected to the vessel body;
a manifold fluidly connected to the plurality of precursor supply packages; and an outlet fluidly connected to the manifold;
the manifold is configured to switch from withdrawing the gas precursor from one of the precursor supply packages to withdrawing the gas precursor from another of the precursor supply packages in response to a pressure sensing signal, wherein the pressure sensing signal is configured to initiate heating to the another precursor supply package.