| CPC C23C 14/26 (2013.01) [C23C 14/24 (2013.01); C23C 14/243 (2013.01); C23C 14/246 (2013.01)] | 8 Claims |

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1. A vapor deposition apparatus, comprising:
a chamber configured to operate at vacuum;
a crucible in the chamber, the crucible configured to receive an ingot;
a feeder operable to move the ingot with respect to the crucible; and
a heater in the chamber, the heater contained between the crucible and the feeder, and configured to heat a hot zone between the crucible and the feeder.
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