US 12,258,659 B2
Crucible cover for coating with an electron beam source
Cris Kroneberger, Livermore, CA (US)
Assigned to FERROTEC (USA) CORPORATION, Santa Clara, CA (US)
Filed by Ferrotec (USA) Corporation, Santa Clara, CA (US)
Filed on Nov. 6, 2023, as Appl. No. 18/387,132.
Application 18/387,132 is a continuation of application No. 17/295,083, granted, now 11,807,935, previously published as PCT/US2018/063180, filed on Nov. 30, 2018.
Prior Publication US 2024/0068085 A1, Feb. 29, 2024
This patent is subject to a terminal disclaimer.
Int. Cl. C23C 14/24 (2006.01); C23C 14/30 (2006.01)
CPC C23C 14/243 (2013.01) [C23C 14/30 (2013.01)] 25 Claims
OG exemplary drawing
 
1. A crucible cover comprising:
a body member configured to interface with a crucible comprising a multiple-pocket vapor source comprising a plurality of pockets, the body member having an opening formed therein; and
an insert member at least partially disposed within the opening and movably interfaced with the body member thereat;
wherein the crucible cover is configured such that, in operation of the crucible cover to cover the multiple-pocket vapor source, the insert member is displaceable relative to the body member such that at least a portion of the insert member remains in physical contact with the crucible but is taken out of physical contact with the body member.