US 12,258,356 B2
Group VI precursor compounds
David M. Ermert, Danbury, CT (US); Thomas H. Baum, New Fairfield, CT (US); and Robert Wright, Jr., Newtown, CT (US)
Assigned to ENTEGRIS, INC., Billerica, MA (US)
Filed by ENTEGRIS, INC., Billerica, MA (US)
Filed on Sep. 27, 2023, as Appl. No. 18/373,868.
Application 18/373,868 is a continuation of application No. 17/736,855, filed on May 4, 2022, granted, now 11,807,653.
Application 17/736,855 is a continuation of application No. 16/803,547, filed on Feb. 27, 2020, granted, now 11,352,383, issued on Jun. 7, 2022.
Claims priority of provisional application 62/811,229, filed on Feb. 27, 2019.
Prior Publication US 2024/0034745 A1, Feb. 1, 2024
Int. Cl. C07F 11/00 (2006.01); H01L 21/02 (2006.01); H01L 21/3205 (2006.01)
CPC C07F 11/00 (2013.01) [H01L 21/02192 (2013.01); H01L 21/32051 (2013.01)] 7 Claims
OG exemplary drawing
 
1. A compound of the Formula (I)

OG Complex Work Unit Chemistry
wherein M is chosen from molybdenum, tungsten, and chromium,
X is chosen from bromo and iodo, and
each L1 and L2 are the same or different and constitute:
(i) a monodentate hydrocarbyl ligand coordinated with M, or
(ii) are taken together to form a bidentate hydrocarbyl ligand coordinated with M,
or wherein, when X is chloro, M is molybdenum or tungsten, and each of L1 and L2 is CH3CN,
wherein the compound is crystalline and sufficiently pure to allow for determination of the unit cell.