| CPC B23K 26/032 (2013.01) [B23K 9/00 (2013.01); B23K 10/02 (2013.01); B23K 15/0046 (2013.01); B23K 26/0643 (2013.01); B23K 26/0648 (2013.01); B23K 26/082 (2015.10); B23K 26/14 (2013.01); B23K 26/244 (2015.10); B23K 31/125 (2013.01); G01B 5/0037 (2013.01); G01B 9/0209 (2013.01); G01B 11/22 (2013.01); G01B 11/2441 (2013.01); G01N 21/954 (2013.01); G01S 7/4817 (2013.01); G01S 17/89 (2013.01); B26F 1/26 (2013.01); B26F 3/004 (2013.01)] | 15 Claims |

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1. A system comprising:
a material processing laser source configured to generate a material processing beam that is applied to a sample location in a material modification process and creates a phase change region (PCR) in a material of the sample, wherein the material modification process includes a keyhole welding process and the PCR includes a keyhole;
an imaging system configured to produce an imaging beam;
an interferometer having a reference arm configured such that a first component of the imaging beam applied to an input of the reference arm results in an output signal of the reference arm, a sample arm configured such that a second component of the imaging beam applied to the sample arm results in an output signal of the sample arm, at least a component of the output signal of the sample arm including reflections of the component of the imaging beam from the sample location, a combiner configured to combine the output signal of the reference arm and the output signal of the sample arm to produce a combined signal as an interferometry output, and
a signal detector configured to produce an interferogram from the interferometry output;
a deflection element configured to control a direction of the imaging beam; and
a controller coupled to the deflection element and configured to control the deflection element such that
alignment of the imaging beam relative to a feature of the PCR is maintained, wherein the feature of the PCR is substantially a bottom surface of the keyhole of the PCR, and
a center of the imaging beam is directed to lag behind the material processing beam in a direction that is related to a velocity direction of the material processing beam relative to the sample location.
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