US 12,257,611 B2
Cleaning jig, coating apparatus, and cleaning method
Satoshi Shimmura, Kumamoto (JP); Koji Takayanagi, Kumamoto (JP); Kenta Shibasaki, Kumamoto (JP); and Hiroichi Inada, Kumamoto (JP)
Assigned to TOKYO ELECTRON LIMITED, Tokyo (JP)
Appl. No. 17/914,108
Filed by Tokyo Electron Limited, Tokyo (JP)
PCT Filed Mar. 15, 2021, PCT No. PCT/JP2021/010392
§ 371(c)(1), (2) Date Sep. 23, 2022,
PCT Pub. No. WO2021/193200, PCT Pub. Date Sep. 30, 2021.
Claims priority of application No. 2020-057079 (JP), filed on Mar. 27, 2020.
Prior Publication US 2024/0207908 A1, Jun. 27, 2024
Int. Cl. B08B 13/00 (2006.01); B05C 11/08 (2006.01); B05C 21/00 (2006.01); B08B 9/08 (2006.01); G03F 7/16 (2006.01)
CPC B08B 9/08 (2013.01) [B05C 11/08 (2013.01); B05C 21/00 (2013.01); G03F 7/162 (2013.01); B08B 2209/08 (2013.01)] 10 Claims
OG exemplary drawing
 
1. A cleaning jig of a disc shape used for cleaning an inside of a container of a spin coating apparatus, including a rotary holder in communication with a nozzle, while the cleaning jig is held by the rotary holder in a same manner as a substrate in the spin coating apparatus that supplies a processing liquid onto the substrate held by the rotary holder disposed in the container and forms a film of the processing liquid on the substrate by rotating the substrate,
wherein a peripheral ceiling portion and a peripheral bottom portion are formed over an entire periphery of the cleaning jig, and a peripheral edge extends between the peripheral ceiling portion and the peripheral bottom portion,
a discharge port is formed to extend along the periphery between the peripheral ceiling portion and the peripheral bottom portion to an opening in the peripheral edge,
a plurality of holes is formed in the peripheral bottom portion inward of the peripheral edge, at intervals in a circumferential direction to extend into the discharge port, and
a lower surface of the peripheral ceiling portion is inclined toward the opening in the peripheral edge.