	US 12,257,592 B2
	Showerhead with embedded nut
Kenneth Brian Doering, San Jose, CA (US)
Assigned to APPLIED MATERIALS, INC., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on May 12, 2023, as Appl. No. 18/196,803.
Application 18/196,803 is a division of application No. 17/098,606, filed on Nov. 16, 2020, granted, now 11,684,941.
Claims priority of provisional application 62/936,495, filed on Nov. 16, 2019.
Prior Publication US 2023/0278062 A1, Sep. 7, 2023
Int. Cl. B05B 15/62 (2018.01); B05B 1/18 (2006.01); H01L 21/67 (2006.01)

CPC B05B 15/62 (2018.02) [B05B 1/18 (2013.01); H01L 21/67017 (2013.01)]

13 Claims

1. A method of forming a showerhead, the method comprising: providing a showerhead body having an inner region and an outer region, the inner region having a back surface and a front surface defining a thickness of the inner region, the outer region having a back surface and a front surface defining a thickness of the outer region, the showerhead body bounded by an outer peripheral edge; forming a cavity within the outer region of the showerhead body, the cavity having a back surface with an opening extending to the back surface of the outer region; placing a nut within the cavity, the nut free to float vertically within the cavity and configured to receive a bolt through the opening in the back surface of the cavity; and fusing a cover plate to the outer region of the front surface of the showerhead to close the cavity, the cover plate having a back surface within the cavity and a front surface substantially coplanar with the front surface of the outer region of the showerhead.