CPC H10N 30/88 (2023.02) [G01L 1/167 (2013.01); G01L 1/183 (2013.01); G01L 9/0055 (2013.01); G01L 19/0092 (2013.01); G01S 3/781 (2013.01); H10N 30/1071 (2023.02); H10N 30/2047 (2023.02); B81B 2201/0264 (2013.01); B81B 2201/032 (2013.01)] | 19 Claims |
1. A pressure-sensing device, the device comprising:
a housing including a membrane;
one or more piezoresistive elements disposed on the membrane and configured to sense a displacement due to a deflection of the membrane;
a first set of electrodes disposed over the membrane; and
a second set of electrodes disposed on a permeable port of the device at a distance from the membrane,
wherein the first set of electrodes and the second set of electrodes form an electrostatic actuator configured to exert a repulsive force onto the membrane to reduce the deflection of the membrane.
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