CPC H05H 7/22 (2013.01) [H01J 37/32082 (2013.01); H01J 41/14 (2013.01); H05B 31/26 (2013.01); H05H 1/46 (2013.01); H05H 1/54 (2013.01); H05H 3/06 (2013.01); H05H 5/04 (2013.01); H05H 6/00 (2013.01); H05H 9/02 (2013.01); H01J 37/08 (2013.01); H01J 41/04 (2013.01); H01T 23/00 (2013.01); H05H 1/4622 (2021.05)] | 9 Claims |
1. A system comprising:
a) an accelerator sub-system that generates a high-energy ion beam, wherein the accelerator sub-system comprises:
i) an ion source plasma chamber,
ii) a microwave generating component which generates microwaves,
iii) a power source operably linked to the microwave generating component,
iv) a waveguide positioned to receive the microwaves and deliver them to the ion source plasma chamber, wherein when the microwaves contact a gas in the ion plasma chamber to generate a source of ions;
v) an ion beam extraction component that is operably linked to the ion source plasma chamber to extract a low-energy ion beam from the ion plasma chamber,
iv) an accelerator component comprising an accelerator column, an accelerator entrance opening for receiving a low-energy ion beam, and an accelerator exit opening for delivering a high-energy ion beam; and
b) a power modulating component operably linked to the power source, wherein the power modulating component is configured to modulate power flowing from the power source to the microwave generating component.
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