CPC H05B 6/62 (2013.01) [H03H 7/38 (2013.01); H05B 6/50 (2013.01); H05B 6/54 (2013.01)] | 9 Claims |
1. A high frequency heating apparatus comprising:
a first electrode that is flat;
a plurality of second electrodes placed opposite to the first electrode, the plurality of second electrodes each being flat;
a high-frequency power supply configured to apply a high-frequency voltage to the first electrode;
a matching unit placed between the first electrode and the high-frequency power supply and configured to be impedance-matched with the high-frequency power supply;
a controller configured to control the high-frequency power supply; and
an electric field regulator configured to individually adjust electric field strengths in a plurality of regions located between the first electrode and the plurality of second electrodes,
wherein the electric field regulator comprises a plurality of impedance elements placed between the plurality of second electrodes and a ground, the plurality of impedance elements being passive elements, and the electric field regulator making the plurality of impedance elements adjust impedances between the plurality of second electrodes and the ground.
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