US 11,936,360 B2
Mass loaded bulk acoustic wave (BAW) resonator structures, devices, and systems
Dariusz Burak, Fort Collins, CO (US); Kevin J. Grannen, Thornton, CO (US); and Jack Lenell, Fort Collins, CO (US)
Assigned to Qxonix Inc., Irvine, CA (US)
Filed by QXONIX, INC., Irvine, CA (US)
Filed on Dec. 29, 2021, as Appl. No. 17/564,797.
Application 17/564,797 is a continuation of application No. 17/380,011, filed on Jul. 20, 2021.
Application 17/380,011 is a continuation of application No. PCT/US2020/043746, filed on Jul. 27, 2020.
Application 17/380,011 is a continuation of application No. 16/940,172, filed on Jul. 27, 2020, granted, now 11,101,783, issued on Aug. 24, 2021.
Claims priority of provisional application 62/881,085, filed on Jul. 31, 2019.
Claims priority of provisional application 62/881,091, filed on Jul. 31, 2019.
Claims priority of provisional application 62/881,074, filed on Jul. 31, 2019.
Claims priority of provisional application 62/881,094, filed on Jul. 31, 2019.
Claims priority of provisional application 62/881,087, filed on Jul. 31, 2019.
Claims priority of provisional application 62/881,077, filed on Jul. 31, 2019.
Claims priority of provisional application 62/881,061, filed on Jul. 31, 2019.
Prior Publication US 2022/0140804 A1, May 5, 2022
Int. Cl. H03H 9/02 (2006.01); H03H 3/02 (2006.01); H03H 9/13 (2006.01); H03H 9/17 (2006.01); H03H 9/205 (2006.01); H03H 9/54 (2006.01); H03H 9/56 (2006.01)
CPC H03H 9/02259 (2013.01) [H03H 3/02 (2013.01); H03H 9/02015 (2013.01); H03H 9/0207 (2013.01); H03H 9/02102 (2013.01); H03H 9/0211 (2013.01); H03H 9/02157 (2013.01); H03H 9/13 (2013.01); H03H 9/131 (2013.01); H03H 9/17 (2013.01); H03H 9/173 (2013.01); H03H 9/175 (2013.01); H03H 9/205 (2013.01); H03H 9/54 (2013.01); H03H 9/568 (2013.01); H03H 2003/021 (2013.01); H03H 2009/02165 (2013.01)] 27 Claims
OG exemplary drawing
 
1. A bulk acoustic wave (BAW) resonator comprising:
a substrate;
first and second piezoelectric layers, in which the first piezoelectric layer has a first piezoelectric axis orientation, and the second piezoelectric layer has a second piezoelectric axis orientation that substantially opposes the first piezoelectric axis orientation of the first piezoelectric layer; and
an acoustic reflector electrode including at least a first and second pair of metal electrode layers electrically and acoustically coupled with the first and second piezoelectric layers, the acoustic reflector electrode including at least a first mass load layer coupled between the second piezoelectric layer and the first pair of metal electrode layers.