US 11,933,808 B2
Buffer unit and method for storaging substrate type sensor for measuring of horizontality of a substrate support member provided on a temperature varying atmosphere
Young Seop Choi, Cheonan-si (KR); Yong-Jun Seo, Hwaseong-si (KR); Sang Hyun Son, Busan (KR); Ji Young Lee, Cheonan-si (KR); Gyeong Ryul Kim, Seoul (KR); and Sun Yong Park, Cheonan-si (KR)
Assigned to SEMES CO., LTD., Cheonan-si (KR)
Filed by SEMES CO., LTD., Cheonan-si (KR)
Filed on Dec. 29, 2021, as Appl. No. 17/564,676.
Claims priority of application No. 10-2020-0189441 (KR), filed on Dec. 31, 2020.
Prior Publication US 2022/0206031 A1, Jun. 30, 2022
Int. Cl. G01P 1/02 (2006.01); G01C 9/00 (2006.01); G01P 15/18 (2013.01); H02J 7/02 (2016.01); H02J 50/10 (2016.01)
CPC G01P 1/023 (2013.01) [G01C 9/00 (2013.01); G01P 15/18 (2013.01); H02J 7/02 (2013.01); H02J 50/10 (2016.02)] 8 Claims
OG exemplary drawing
 
1. A buffer unit for temporarily storing a substrate, the buffer unit comprising:
a housing having a space for storing a substrate therein;
one or more slots disposed within the housing for placing the substrate thereon; and
a holding unit disposed at a bottom portion of the housing, having a flat and non-inclined top surface, and comprising a built-in wireless charging module,
wherein a substrate type sensor is supported by the flat and non-inclined top surface of the holding unit, and
wherein the holding unit further comprises a level sensor configured to measure a degree of inclination of the flat and non-inclined top surface of the holding unit.