CPC G01P 1/023 (2013.01) [G01C 9/00 (2013.01); G01P 15/18 (2013.01); H02J 7/02 (2013.01); H02J 50/10 (2016.02)] | 8 Claims |
1. A buffer unit for temporarily storing a substrate, the buffer unit comprising:
a housing having a space for storing a substrate therein;
one or more slots disposed within the housing for placing the substrate thereon; and
a holding unit disposed at a bottom portion of the housing, having a flat and non-inclined top surface, and comprising a built-in wireless charging module,
wherein a substrate type sensor is supported by the flat and non-inclined top surface of the holding unit, and
wherein the holding unit further comprises a level sensor configured to measure a degree of inclination of the flat and non-inclined top surface of the holding unit.
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