US 11,933,549 B2
Nanowire-based thermal interface
Sheng Shen, Pittsburgh, PA (US); Wei Gong, Pittsburgh, PA (US); Pengfei Li, Pittsburgh, PA (US); Lin Jing, Pittsburgh, PA (US); Itzhaq Cohen-Karni, Pittsburgh, PA (US); and Raghav Garg, Pittsburgh, PA (US)
Assigned to Carnegie Mellon University, Pittsburgh, PA (US)
Filed by CARNEGIE MELLON UNIVERSITY, Pittsburgh, PA (US)
Filed on Sep. 22, 2022, as Appl. No. 17/950,432.
Application 17/950,432 is a division of application No. 17/106,608, filed on Nov. 30, 2020, granted, now 11,493,288.
Application 17/106,608 is a continuation in part of application No. 16/436,167, filed on Jun. 10, 2019, granted, now 10,971,423, issued on Apr. 6, 2021.
Claims priority of provisional application 62/763,297, filed on Jun. 8, 2018.
Prior Publication US 2023/0019670 A1, Jan. 19, 2023
Int. Cl. F28F 13/18 (2006.01); B82Y 30/00 (2011.01); B82Y 40/00 (2011.01)
CPC F28F 13/18 (2013.01) [B82Y 30/00 (2013.01); B82Y 40/00 (2013.01)] 20 Claims
 
1. A process for creating a thermal interface comprising:
providing a template having a plurality of pores;
depositing a metal seed layer on one surface of the template;
forming a plurality of nanowires within the pores of the template to a height approximately even with a surface of the template opposite the metal seed layer, thereby forming a nanowire array;
etching the template to release the plurality of nanowires in the nanowire array from the template;
coating each of the plurality of nanowires with a graphene coating; and
depositing a top metal layer on the nanowire array.