US 11,932,950 B2
Organic contamination free surface machining
Yuanhong Guo, Mountain View, CA (US); Sheng Michael Guo, San Mateo, CA (US); Marek W. Radko, San Jose, CA (US); Steven Victor Sansoni, Livermore, CA (US); Nagendra Madiwal, Cupertino, CA (US); Matvey Farber, Redwood City, CA (US); Pingping Gou, Foster City, CA (US); Song-Moon Suh, San Jose, CA (US); Jeffrey C. Hudgens, San Francisco, CA (US); Yuji Murayama, Los Gatos, CA (US); Anurag Bansal, Fremont, CA (US); Shaofeng Chen, Austin, TX (US); and Michael Kuchar, Georgetown, TX (US)
Assigned to Applied Materials, Inc., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Jan. 13, 2023, as Appl. No. 18/097,152.
Application 18/097,152 is a continuation of application No. 17/241,241, filed on Apr. 27, 2021, granted, now 11,555,250.
Claims priority of provisional application 63/017,610, filed on Apr. 29, 2020.
Prior Publication US 2023/0151497 A1, May 18, 2023
This patent is subject to a terminal disclaimer.
Int. Cl. B08B 3/04 (2006.01); B23C 3/00 (2006.01); C23C 14/58 (2006.01); C23F 1/16 (2006.01); C23F 1/20 (2006.01); C23F 17/00 (2006.01); H01L 21/67 (2006.01)
CPC C23F 17/00 (2013.01) [B08B 3/04 (2013.01); B23C 3/00 (2013.01); C23C 14/5873 (2013.01); C23F 1/16 (2013.01); C23F 1/20 (2013.01); H01L 21/67184 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A method comprising:
machining a raw surface of a metal component to remove first native oxide from a metal base of the metal component to generate an as-machined surface of the metal component, wherein a second native oxide is formed on the metal base of the as-machined surface of the metal component subsequent to the machining; and
subsequent to the machining, performing operations to generate a finished surface of the metal component, the operations comprising a surface machining of the as-machined surface of the metal component to remove the second native oxide.