	US 11,931,694 B1
	Carbon dioxide and nitrogen oxides removal system for point of use abatement
Justin Weinstein, Clifton Park, NY (US)
Assigned to GlobalFoundries U.S. Inc., Malta, NY (US)
Filed by GlobalFoundries U.S. Inc., Malta, NY (US)
Filed on Oct. 11, 2023, as Appl. No. 18/484,497.
Int. Cl. B01D 53/26 (2006.01); B01D 53/86 (2006.01); B01D 53/90 (2006.01); B01D 53/96 (2006.01)

CPC B01D 53/90 (2013.01) [B01D 53/265 (2013.01); B01D 53/8631 (2013.01); B01D 53/8671 (2013.01); B01D 53/8696 (2013.01); B01D 53/96 (2013.01); B01D 2252/20447 (2013.01); B01D 2252/20484 (2013.01); B01D 2252/504 (2013.01); B01D 2257/404 (2013.01); B01D 2257/504 (2013.01); B01D 2258/0216 (2013.01)]

20 Claims

1. A system comprising:

an abatement apparatus configured to abate an emission stream from a semiconductor manufacturing process;

a condenser coupled to the abatement apparatus and configured to reduce water vapor of the emission stream and yield an effluent; and

a reduction tower coupled to the condenser, wherein the reduction tower comprises:

a reduction chamber having an inlet coupled to an outlet of the condenser, and

a nozzle disposed within the reduction chamber and configured to dispense a solution therein, which catalyzes a chemical reaction to absorb a pollutant from the effluent and yield an exhaust substantially free of the pollutant.