US 12,256,643 B2
Piezoelectric bending actuator drive for use in a moist environment
Benjamin Dargatz, Jena (DE); Kevin Speer, Mörsdorf (DE); and Bernd Broich, Weid (DE)
Assigned to PI CERAMIC GMBH, Lederhose (DE)
Appl. No. 16/349,100
Filed by PI Ceramic GmbH, Lederhose (DE)
PCT Filed Nov. 10, 2017, PCT No. PCT/EP2017/078958
§ 371(c)(1), (2) Date May 10, 2019,
PCT Pub. No. WO2018/087333, PCT Pub. Date May 17, 2018.
Claims priority of application No. 10 2016 121 587.2 (DE), filed on Nov. 10, 2016.
Prior Publication US 2020/0185589 A1, Jun. 11, 2020
Int. Cl. H10N 30/88 (2023.01); H10N 30/20 (2023.01)
CPC H10N 30/883 (2023.02) [H10N 30/2047 (2023.02)] 21 Claims
OG exemplary drawing
 
1. A piezoelectric drive, configured for use in a moist environment, the piezoelectric drive comprising:
a housing having a chamber, which is hermetically sealed by an elastic membrane, wherein the elastic membrane is fixedly connected to the housing such that the hermetic seal is formed; and
a piezoelectric drive unit arranged in the hermetically sealed chamber and configured to be piezoelectrically deformed by electric actuation for driving a drive element, wherein the piezoelectric drive unit includes at least one piezoelectric bending actuator, which is constituted by at least one piezocontractor applied to a substrate, for generating, when electrically actuated, a bending deflection transversely to the elastic membrane,
wherein the piezoelectric drive unit is connected to the elastic membrane and the housing, and is configured to be coupled to or is coupled, via a form fit, to the drive element arranged outside the chamber.