US 12,256,642 B2
Ultrasound transducer with distributed cantilevers
Seow Yuen Yee, Mountain View, CA (US); Vladimir Petkov, San Jose, CA (US); Matthias Boecker, Reutlingen (DE); Timo Schary, Aichtal (DE); and Reinhold Roedel, Reutlingen (DE)
Assigned to Robert Bosch GmbH, (DE)
Filed by Robert Bosch GmbH, Stuttgart (DE)
Filed on Jul. 12, 2021, as Appl. No. 17/373,271.
Prior Publication US 2023/0009789 A1, Jan. 12, 2023
Int. Cl. H01L 41/113 (2006.01); B06B 1/06 (2006.01); G01B 17/02 (2006.01); G01S 7/521 (2006.01); G01S 15/931 (2020.01); H10N 30/30 (2023.01); H10N 30/50 (2023.01); A61B 8/00 (2006.01)
CPC H10N 30/306 (2023.02) [B06B 1/0607 (2013.01); G01B 17/02 (2013.01); G01S 7/521 (2013.01); G01S 15/931 (2013.01); H10N 30/302 (2023.02); H10N 30/50 (2023.02); A61B 8/4483 (2013.01); G01S 2015/932 (2013.01)] 13 Claims
OG exemplary drawing
 
1. An ultrasound transducer of a vehicle system, comprising:
a support member that attaches to and connects to the bottom portion of a membrane of the ultrasound transducer and supports the membrane, wherein the support member includes one or more cantilevers with a first end attaching to the membrane and a second end attaching to a support portion of the support member that attaches to the substrate, wherein the one or more cantilevers extend across and floats above the substrate, wherein the first end of one of the cantilevers includes a stub extending away from a surface of the cantilever, wherein the stub extends away from the surface without contacting the substrate, wherein the one or more cantilevers includes one or more piezoelectric portions on the surface of the cantilever.