US 12,256,471 B2
Apparatus for heating substrate and method thereof
Takahisa Mase, Nirasaki (JP)
Assigned to Tokyo Electron Limited, Tokyo (JP)
Filed by Tokyo Electron Limited, Tokyo (JP)
Filed on Sep. 1, 2021, as Appl. No. 17/446,667.
Claims priority of application No. 2020-151978 (JP), filed on Sep. 10, 2020.
Prior Publication US 2022/0078888 A1, Mar. 10, 2022
Int. Cl. H05B 1/02 (2006.01); C23C 16/46 (2006.01); C23C 16/52 (2006.01); G05D 23/19 (2006.01); G05D 23/24 (2006.01); H05B 3/22 (2006.01)
CPC H05B 1/0233 (2013.01) [C23C 16/46 (2013.01); C23C 16/52 (2013.01); G05D 23/1917 (2013.01); G05D 23/2401 (2013.01); H05B 3/22 (2013.01); H05B 2203/005 (2013.01)] 12 Claims
OG exemplary drawing
 
1. An apparatus for heating a substrate, comprising:
a stage on which the substrate is placed and including at least one resistance heater configured to heat the substrate;
a temperature detector configured to detect a heating temperature of the substrate heated by the at least one resistance heater;
a temperature calculator configured to calculate the heating temperature based on a resistance value of the at least one resistance heater, which is obtained from a current value and a voltage value of a power supplied to the at least one resistance heater;
a power controller configured to perform a power control with respect to a first power to be supplied to the at least one resistance heater such that the heating temperature is adjusted towards a first preset temperature by applying a phase control and a zero-cross control in a switching manner with respect to a power output from an alternate current (AC) power supply; and
a controller,
wherein the controller is configured to:
switch the power control of the power controller such that, in a low temperature range in which the heating temperature is lower than a preset switching temperature, the power control is performed through the phase control based on a detection result of the heating temperature detected by the temperature detector and, in a high temperature range in which the heating temperature is higher than the preset switching temperature, the power control is performed through the zero-cross control based on a calculation result of the heating temperature calculated by the temperature calculator.