US 12,255,628 B2
Acoustic wave device
Takashi Yamane, Nagaokakyo (JP); Sho Nagatomo, Nagaokakyo (JP); and Tetsuya Kimura, Nagaokakyo (JP)
Assigned to MURATA MANUFACTURING CO., LTD., Kyoto (JP)
Filed by Murata Manufacturing Co., Ltd., Nagaokakyo (JP)
Filed on Mar. 23, 2022, as Appl. No. 17/701,973.
Application 17/701,973 is a continuation of application No. PCT/JP2020/036398, filed on Sep. 25, 2020.
Claims priority of application No. 2019-178099 (JP), filed on Sep. 27, 2019.
Prior Publication US 2022/0216854 A1, Jul. 7, 2022
Int. Cl. H03H 9/56 (2006.01); H03H 9/02 (2006.01); H03H 9/13 (2006.01); H03H 9/17 (2006.01)
CPC H03H 9/568 (2013.01) [H03H 9/02031 (2013.01); H03H 9/02228 (2013.01); H03H 9/132 (2013.01); H03H 9/174 (2013.01); H03H 9/175 (2013.01); H03H 9/176 (2013.01); H03H 9/562 (2013.01); H03H 9/564 (2013.01)] 18 Claims
OG exemplary drawing
 
1. An acoustic wave device, comprising:
a piezoelectric layer; and
a first electrode and a second electrode facing each other in a direction intersecting a thickness direction of the piezoelectric layer; wherein
a material of the piezoelectric layer is lithium niobate or lithium tantalate;
a plurality of electrode portions including the first electrode and the second electrode are provided;
a first divided resonator and a second divided resonator connected in series without another resonator connected between the first divided resonator and the second divided resonator, or connected in parallel with each other to a same connection node on a path connecting an input terminal and an output terminal are provided;
a support substrate including a first main surface and a second main surface opposed to each other is provided;
the first divided resonator includes a first electrode portion of the plurality of electrode portions and a first installation portion of the piezoelectric layer including a first region in which the first electrode portion is provided;
the second divided resonator includes a second electrode portion of the of the plurality of electrode portions and a second installation portion of the piezoelectric layer including a second region in which the second electrode portion is provided;
the piezoelectric layer is directly or indirectly on the support substrate;
the support substrate includes:
a first energy confinement layer overlapping at least a portion of the first region of the piezoelectric layer in a plan view from the thickness direction of the piezoelectric layer; and
a second energy confinement layer overlapping at least a portion of the second region of the piezoelectric layer in the plan view from the thickness direction of the piezoelectric layer;
the support substrate includes a wall portion between the first energy confinement layer and the second energy confinement layer;
a thickness of the first divided resonator is a thickness of the first installation portion;
a thickness of the second divided resonator is a thickness of the second installation portion; and
the thickness of the first divided resonator and the thickness of the second divided resonator are different from each other.