US 12,255,624 B2
Bulk acoustic wave resonator having multiple resonant frequencies
Yiliu Wang, Irvine, CA (US); Jiansong Liu, Fremont, CA (US); and Tomoya Komatsu, Irvine, CA (US)
Assigned to Skyworks Solutions, Inc., Irvine, CA (US)
Filed by Skyworks Solutions, Inc., Irvine, CA (US)
Filed on Nov. 18, 2021, as Appl. No. 17/455,645.
Claims priority of provisional application 63/130,209, filed on Dec. 23, 2020.
Claims priority of provisional application 63/130,237, filed on Dec. 23, 2020.
Prior Publication US 2022/0200571 A1, Jun. 23, 2022
Int. Cl. H03H 9/56 (2006.01); H03H 9/17 (2006.01); H03H 9/205 (2006.01); H03H 9/54 (2006.01)
CPC H03H 9/568 (2013.01) [H03H 9/173 (2013.01); H03H 9/175 (2013.01); H03H 9/205 (2013.01); H03H 9/547 (2013.01); H03H 9/564 (2013.01)] 20 Claims
OG exemplary drawing
 
1. An acoustic wave filter configured to filter a radio frequency signal, the acoustic wave filter comprising:
a plurality of shunt acoustic wave resonators including a bulk acoustic wave resonator, the bulk acoustic wave resonator having at least a first resonant frequency corresponding to a first region and a second resonant frequency corresponding to a second region, the second resonant frequency being different than the first resonant frequency, the bulk acoustic wave resonator including a raised frame structure in a raised frame region that surrounds the first region and the second region in plan view, and the bulk acoustic wave resonator having a first peak conductance at the first resonant frequency and a second peak conductance at the second resonant frequency; and
a plurality of series acoustic wave resonators, the plurality of series acoustic wave resonators and the plurality of shunt acoustic wave resonators together configured to filter the radio frequency signal, the acoustic wave filter having a passband, and the first resonant frequency and the second resonant frequency both impacting the passband.