US 12,255,621 B2
Radio frequency filter
Jiang Jiang, Fujian (CN); Ping Li, Fujian (CN); Wei Wang, Fujian (CN); Mingguo Zhu, Fujian (CN); Nianchu Hu, Fujian (CN); and Bin Jia, Fujian (CN)
Assigned to EPICMEMS(XIAMEN) CO., LTD., Fujian (CN)
Appl. No. 17/790,382
Filed by EPICMEMS(XIAMEN) CO., LTD., Fujian (CN)
PCT Filed Jan. 20, 2020, PCT No. PCT/CN2020/073288
§ 371(c)(1), (2) Date Jun. 30, 2022,
PCT Pub. No. WO2021/146855, PCT Pub. Date Jul. 29, 2021.
Prior Publication US 2023/0039933 A1, Feb. 9, 2023
Int. Cl. H03H 9/54 (2006.01); H03H 9/13 (2006.01); H03H 9/17 (2006.01)
CPC H03H 9/547 (2013.01) [H03H 9/131 (2013.01); H03H 9/17 (2013.01)] 10 Claims
OG exemplary drawing
 
1. A radio frequency filter, comprising:
a substrate;
a supporting electrode protruded on a front surface of the substrate; and
a thin film structure formed on the substrate and spaced with the substrate by the supporting electrode,
wherein an end surface of a top end of the supporting electrode is in sealing contact with a front surface of the thin film structure, and the supporting electrode comprises:
a first supporting electrode protruded outwardly with respect to the substrate on an edge of the front surface of the substrate, while the first supporting electrode is of an annular closed structure surrounding the edge of the front surface of the substrate; and
a plurality of second supporting electrodes, each second supporting electrode of the plurality of second supporting electrodes is protruded with respect to the substrate on a middle portion of the front surface of the substrate, and the plurality of second supporting electrodes are surrounded by the first supporting electrode on the middle portion of the front surface of the substrate.