US 12,255,619 B2
Vibration element, manufacturing method of vibration element, physical quantity sensor, inertial measurement device, electronic apparatus, and vehicle
Seiichiro Ogura, Minowa (JP); Keiichi Yamaguchi, Ina (JP); Masahiro Oshio, Shiojiri (JP); and Takashi Yamazaki, Shiojiri (JP)
Assigned to SEIKO EPSON CORPORATION, (JP)
Filed by SEIKO EPSON CORPORATION, Tokyo (JP)
Filed on Aug. 8, 2023, as Appl. No. 18/446,074.
Application 18/446,074 is a continuation of application No. 18/081,084, filed on Dec. 14, 2022, granted, now 11,888,464.
Application 18/081,084 is a continuation of application No. 17/243,632, filed on Apr. 29, 2021, granted, now 11,595,026, issued on Feb. 28, 2023.
Application 17/243,632 is a continuation of application No. 16/253,712, filed on Jan. 22, 2019, granted, now 11,025,222, issued on Jun. 1, 2021.
Claims priority of application No. 2018-009173 (JP), filed on Jan. 23, 2018.
Prior Publication US 2023/0387885 A1, Nov. 30, 2023
This patent is subject to a terminal disclaimer.
Int. Cl. H03H 9/21 (2006.01); G01C 19/5607 (2012.01); G01C 19/5621 (2012.01); G01C 19/5628 (2012.01); G01C 19/5656 (2012.01); G01C 19/5663 (2012.01); H03H 3/02 (2006.01); H03H 3/04 (2006.01); H03H 9/05 (2006.01); H03H 9/10 (2006.01)
CPC H03H 9/21 (2013.01) [G01C 19/5607 (2013.01); G01C 19/5621 (2013.01); G01C 19/5628 (2013.01); G01C 19/5656 (2013.01); G01C 19/5663 (2013.01); H03H 3/02 (2013.01); H03H 3/04 (2013.01); H03H 9/0533 (2013.01); H03H 9/0547 (2013.01); H03H 9/0595 (2013.01); H03H 9/1014 (2013.01); H03H 2003/026 (2013.01); H03H 2003/0492 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A vibration element comprising:
three axes orthogonal to each other being defined as an X axis, a Y axis, and a Z axis;
a base; and
a vibrating arm extending from the base in a Y axis direction along the Y axis;
wherein the vibrating arm comprises:
an arm section located on a side of the base; and
a weight section located on a tip side of the arm section and including a first principal surface and a second principal surface having a front-back relationship in a Z axis direction along the Z axis;
a weight film arranged on a side of the second principal surface of the weight section;
wherein the weight section comprises:
a first portion; and
a second portion that is thinner in the Z axis direction than the first portion;
wherein the second portion is arranged on both sides of the first portion in a cross-sectional view from the Y axis direction,
a center of gravity of the weight section is closer to a first principal surface side than a center plane of the arm section, the center plane passing through a center in the Z axis direction of the arm section and being parallel to an X-Y plane including the X axis and the Y axis;
a center of gravity of the weight film is closer to the second principal surface than the center plane;
wherein the weight film comprises:
a first weight film disposed on the second principal surface at the first portion; and
a second weight film disposed on the second principal surface at the second portion; and
wherein a height from the center plane to a principal surface of the first weight film is higher than a height from the center plane to a principal surface of the second weight film.