US 12,255,616 B2
Acoustic wave resonator with multiple resonant frequencies
Yasufumi Kaneda, Yokohama (JP); Yiliu Wang, Irvine, CA (US); and Tomoya Komatsu, Irvine, CA (US)
Assigned to Skyworks Solutions, Inc., Irvine, CA (US)
Filed by Skyworks Solutions, Inc., Irvine, CA (US)
Filed on Sep. 15, 2023, as Appl. No. 18/368,814.
Application 18/368,814 is a continuation of application No. 17/138,478, filed on Dec. 30, 2020, granted, now 11,799,447.
Application 17/138,478 is a continuation of application No. 16/865,688, filed on May 4, 2020, granted, now 11,437,976, issued on Sep. 6, 2022.
Claims priority of provisional application 62/843,973, filed on May 6, 2019.
Claims priority of provisional application 62/843,988, filed on May 6, 2019.
Prior Publication US 2024/0088867 A1, Mar. 14, 2024
This patent is subject to a terminal disclaimer.
Int. Cl. H03H 9/145 (2006.01); H03H 9/02 (2006.01); H03H 9/25 (2006.01); H03H 9/64 (2006.01); H03H 9/72 (2006.01); H04B 1/00 (2006.01)
CPC H03H 9/14544 (2013.01) [H03H 9/02228 (2013.01); H03H 9/02574 (2013.01); H03H 9/02834 (2013.01); H03H 9/14541 (2013.01); H03H 9/25 (2013.01); H03H 9/6409 (2013.01); H03H 9/725 (2013.01); H04B 1/0057 (2013.01)] 20 Claims
OG exemplary drawing
 
1. An acoustic wave resonator with a first resonant frequency and a second resonant frequency, the acoustic wave resonator comprising:
a piezoelectric layer;
a first acoustic reflector on the piezoelectric layer;
a second acoustic reflector on the piezoelectric layer; and
an interdigital transducer electrode on the piezoelectric layer and positioned between the first acoustic reflector and the second acoustic reflector, the interdigital transducer electrode including first fingers in a first region associated with the first resonant frequency and second fingers in a second region associated with the second resonant frequency, an outer finger of the first fingers being spaced apart from the first acoustic reflector by a gap, the outer finger and an adjacent finger of the first fingers having a first pitch, the second fingers having a second pitch corresponding to the second resonant frequency, and the second pitch is less than the first pitch.