US 12,255,614 B2
Bulk acoustic wave filter structure with conductive bridge forming electrical loop with an electrode
Yazid Yusuf, Orlando, FL (US); Mohammad J. Modarres-Zadeh, Longwood, FL (US); Andreas Tag, Altamonte Springs, FL (US); Paul Stokes, Orlando, FL (US); Robert Aigner, Ocoee, FL (US); and Gernot Fattinger, Sorrento, FL (US)
Assigned to Qorvo US, Inc., Greensboro, NC (US)
Filed by Qorvo US, Inc., Greensboro, NC (US)
Filed on Nov. 10, 2022, as Appl. No. 17/984,879.
Application 17/984,879 is a continuation of application No. 17/176,476, filed on Feb. 16, 2021, granted, now 11,528,007.
Claims priority of provisional application 63/105,390, filed on Oct. 26, 2020.
Prior Publication US 2023/0074357 A1, Mar. 9, 2023
This patent is subject to a terminal disclaimer.
Int. Cl. H03H 9/13 (2006.01); H03H 9/02 (2006.01); H03H 9/17 (2006.01); H03H 9/54 (2006.01)
CPC H03H 9/131 (2013.01) [H03H 9/02086 (2013.01); H03H 9/13 (2013.01); H03H 9/132 (2013.01); H03H 9/17 (2013.01); H03H 9/54 (2013.01)] 19 Claims
OG exemplary drawing
 
1. A bulk acoustic wave (BAW) filter structure, comprising:
a substrate; and
at least one transducer over the substrate, the at least one transducer comprising:
a first electrode comprising a first electrical medial end and a first electrical distal end,
a second electrode,
a piezoelectric layer between the first electrode and the second electrode,
a first conductive bridge offset from at least a portion of the first electrode by a first insulating volume,
wherein the first conductive bridge is electrically connected to the first electrical medial end and the first electrical distal end to form a first electrical loop between the first electrical medial end and the first electrical distal end of the first electrode; and
wherein the first conductive bridge comprises:
a span portion,
a first medial conductive via electrically connecting the span portion to the first electrical medial end of the first electrode, and
a first distal conductive via electrically connecting the span portion to the first electrical distal end of the first electrode.