US 12,255,609 B2
Acoustic devices with layer structures, devices and systems
Dariusz Burak, Fort Colins, CO (US); Kevin J. Grannen, Thornton, CO (US); and Jack Lenell, Fort Collins, CO (US)
Assigned to QXONIX, INC., Irvine, CA (US)
Filed by QXONIX INC., Irvine, CA (US)
Filed on Dec. 29, 2021, as Appl. No. 17/564,818.
Application 17/564,818 is a continuation of application No. PCT/US2020/043760, filed on Jul. 27, 2020.
Claims priority of provisional application 62/881,061, filed on Jul. 31, 2019.
Claims priority of provisional application 62/881,074, filed on Jul. 31, 2019.
Claims priority of provisional application 62/881,077, filed on Jul. 31, 2019.
Claims priority of provisional application 62/881,085, filed on Jul. 31, 2019.
Claims priority of provisional application 62/881,087, filed on Jul. 31, 2019.
Claims priority of provisional application 62/881,091, filed on Jul. 31, 2019.
Claims priority of provisional application 62/881,094, filed on Jul. 31, 2019.
Prior Publication US 2022/0123719 A1, Apr. 21, 2022
Int. Cl. H03H 9/02 (2006.01); H03H 3/02 (2006.01); H03H 9/13 (2006.01); H03H 9/17 (2006.01); H03H 9/205 (2006.01); H03H 9/54 (2006.01); H03H 9/56 (2006.01)
CPC H03H 9/02259 (2013.01) [H03H 3/02 (2013.01); H03H 9/02015 (2013.01); H03H 9/0207 (2013.01); H03H 9/02102 (2013.01); H03H 9/0211 (2013.01); H03H 9/02157 (2013.01); H03H 9/13 (2013.01); H03H 9/131 (2013.01); H03H 9/17 (2013.01); H03H 9/173 (2013.01); H03H 9/175 (2013.01); H03H 9/205 (2013.01); H03H 9/54 (2013.01); H03H 9/568 (2013.01); H03H 2003/021 (2013.01); H03H 2009/02165 (2013.01)] 30 Claims
OG exemplary drawing
 
1. An acoustic wave device comprising:
a substrate;
a piezoelectric stack including at least a first piezoelectric layer, a second piezoelectric layer and a third piezoelectric layer, in which the second piezoelectric layer has a second piezoelectric axis orientation, and the third piezoelectric layer has a third piezoelectric axis orientation that substantially opposes the second piezoelectric axis orientation of the second piezoelectric layer; and
an interposer layer coupled between the third piezoelectric layer and the second piezoelectric layer to facilitate the third piezoelectric axis orientation that substantially opposes the second piezoelectric axis orientation of the second piezoelectric layer, in which the interposer layer includes at least a dielectric, and in which the interposer layer has a thickness of less than about a quarter of a wavelength of a main resonant frequency of the acoustic wave device.