US 12,255,603 B2
Two dimensional rod resonator for RF filtering
Cristian Cassella, Boston, MA (US); and Xuanyi Zhao, Brookline, MA (US)
Assigned to Northeastern University, Boston, MA (US)
Filed by Northeastern University, Boston, MA (US)
Filed on Oct. 10, 2023, as Appl. No. 18/378,254.
Application 18/378,254 is a continuation of application No. 17/097,289, filed on Nov. 13, 2020, granted, now 11,784,623.
Claims priority of provisional application 62/984,426, filed on Mar. 3, 2020.
Claims priority of provisional application 62/935,769, filed on Nov. 15, 2019.
Prior Publication US 2024/0039504 A1, Feb. 1, 2024
Int. Cl. H03H 9/02 (2006.01); H03H 3/04 (2006.01); H03H 9/13 (2006.01); H03H 9/17 (2006.01); H03H 9/56 (2006.01)
CPC H03H 9/02031 (2013.01) [H03H 3/04 (2013.01); H03H 9/13 (2013.01); H03H 9/176 (2013.01); H03H 9/568 (2013.01); H03H 2003/0435 (2013.01)] 14 Claims
OG exemplary drawing
 
1. A resonator device comprising:
a piezoelectric layer suspended from a substrate, the piezoelectric layer having a width direction, a length direction, and a thickness direction, the piezoelectric layer having a bottom surface and a top surface, the piezoelectric layer comprising a beam extending along the bottom surface continuously in the width direction and the length direction, a plurality of rod portions extending continuously in the length direction and upwardly from the beam to the top surface, the plurality of rod portions spaced apart in the width direction;
a bottom electrode comprising a metal plate in contact with the bottom surface of the piezoelectric layer; and
a top electrode comprising a metal grating comprising a plurality of conductive strips, the plurality of conductive strips overlaying only the plurality of rod portions and aligned with the plurality of rod portions of the piezoelectric layer; and
wherein the plurality of conductive strips and corresponding ones of the plurality of rod portions of the piezoelectric layer form a plurality of rods, and portions of the beam of the piezoelectric layer and the bottom electrode form a plurality of uncovered trenches between the plurality of rods.