US 12,255,599 B2
Piezoelectric resonator unit and oscillator provided with the same
Eitaro Kameda, Nagaokakyo (JP); Keisuke Takeyama, Nagaokakyo (JP); Toshio Nishimura, Nagaokakyo (JP); and Hiroshi Nakatani, Nagaokakyo (JP)
Assigned to MURATA MANUFACTURING CO., LTD., Nagaokakyo (JP)
Filed by Murata Manufacturing Co., Ltd., Nagaokakyo (JP)
Filed on Jan. 4, 2022, as Appl. No. 17/568,017.
Application 17/568,017 is a continuation of application No. PCT/JP2020/010771, filed on Mar. 12, 2020.
Claims priority of application No. 2019-129570 (JP), filed on Jul. 11, 2019.
Prior Publication US 2022/0123705 A1, Apr. 21, 2022
Int. Cl. H03H 3/02 (2006.01); H03H 9/02 (2006.01); H03H 9/56 (2006.01)
CPC H03H 3/02 (2013.01) [H03H 9/02023 (2013.01); H03H 9/564 (2013.01)] 18 Claims
OG exemplary drawing
 
1. A piezoelectric resonator unit comprising:
a base;
a cover; and
a laminated structure disposed between the base and the cover, and including:
a piezoelectric resonator that includes:
a piezoelectric layer having a pair of principal surfaces, and
a pair of excitation electrodes each disposed on one of the pair of principal surfaces of the piezoelectric layer, respectively, so as to face each other with the piezoelectric layer therebetween,
a semiconductor layer disposed on one of the pair of principal surfaces of the piezoelectric layer, and
a pair of measurement electrodes disposed on the semiconductor layer and configured to measure a signal based on a temperature of the piezoelectric resonator through the semiconductor layer,
wherein the pair of measurement electrodes are configured to measure either an inductance or a capacitance of the semiconductor layer.