US 12,255,595 B2
Calibration method, corresponding circuit and apparatus
Marco Sautto, Zurich (CH); Giona Fucili, Milan (IT); Valerio Lo Muzzo, Singapore (SG); and Kaufik Linggajaya, Singapore (SG)
Assigned to STMicroelectronics Asia Pacific Pte Ltd., Singapore (SG); and STMicroelectronics S.r.l., Agrate Brianza (IT)
Filed by STMicroelectronics S.r.l., Agrate Brianza (IT); and STMicroelectronics Asia Pacific Pte Ltd., Singapore (SG)
Filed on Jul. 9, 2021, as Appl. No. 17/371,368.
Claims priority of application No. 102020000017200 (IT), filed on Jul. 15, 2020.
Prior Publication US 2022/0021373 A1, Jan. 20, 2022
Int. Cl. H01L 41/02 (2006.01); H03H 11/04 (2006.01); H10N 30/30 (2023.01)
CPC H03H 11/0422 (2013.01) [H10N 30/30 (2023.02); H03H 2011/0488 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A method of operating a piezoelectric transducer configured to transduce mechanical vibrations into transduced electrical signals at a pair of sensor electrodes, the method comprising:
stimulating a resonant oscillation of the piezoelectric transducer by applying at least one pulse electrical stimulation signal to the pair of sensor electrodes;
detecting, at the pair of sensor electrodes, at least one electrical signal resulting from the stimulated resonant oscillation, wherein the at least one electrical signal resulting from the stimulated resonant oscillation oscillates at a resonance frequency of the piezoelectric transducer;
measuring a frequency of oscillation of the at least one electrical signal resulting from the stimulated resonant oscillation using a measurement arrangement to obtain a measured resonance frequency of the piezoelectric transducer; and
tuning a stopband frequency of a notch filter coupled to the piezoelectric transducer to match the measured resonance frequency of the piezoelectric transducer, wherein tuning the stopband frequency comprises measuring the stopband frequency using the same measurement arrangement used to measure the frequency of oscillation of the at least one electrical signal.