US 12,255,411 B2
Frequency reconfigurable phased array system and material processing method performed thereby
Joseph Poujiong Wang, New Taipei (TW); Chia Ching Huang, Changhua County (TW); Wei-Ji Chen, Tainan (TW); and Yueh-Lin Tsai, Yunlin County (TW)
Assigned to INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE, Hsinchu (TW)
Filed by INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE, Hsinchu (TW)
Filed on Dec. 28, 2020, as Appl. No. 17/135,538.
Claims priority of application No. 109144534 (TW), filed on Dec. 16, 2020.
Prior Publication US 2022/0190475 A1, Jun. 16, 2022
Int. Cl. H05B 6/72 (2006.01); H01Q 3/26 (2006.01); H01Q 3/28 (2006.01); H01Q 3/38 (2006.01); H05B 6/64 (2006.01)
CPC H01Q 3/38 (2013.01) [H01Q 3/2658 (2013.01); H01Q 3/28 (2013.01); H05B 6/72 (2013.01); H05B 6/6435 (2013.01)] 16 Claims
OG exemplary drawing
 
1. A frequency reconfigurable phased array system, adapted to a material to be processed, including:
a signal source, configured to output an power signal with an adjustable frequency;
a plurality of radio frequency (RF) modules, which are signal-transmittably connected to the signal source to receive the power signal, wherein the RF modules further generate a plurality of mode radiation patterns according to a plurality of RF phases and RF operating power;
a control module, which is signal-transmittably connected to the signal source and the RF modules, wherein the control module uses a part of RF phases and a part of the RF operating power corresponding to a part of the mode radiation patterns as a plurality of operating modes according to an electromagnetic field distribution uniformity of the mode radiation patterns, uses one or more of the operating modes corresponding to a same operating frequency of the signal source as one mode excitation parameter set to generate a plurality of mode excitation parameter sets, wherein each of the mode radiation patterns is characterized by an eigenvalue and a weighting vector of electromagnetic field distribution correspondingly,
and the control module selects a part of the operating modes from the mode excitation parameter sets as one material processing event set according to an energy distribution uniformity to generate a plurality of material processing event sets;
a first database, which is signal-transmittably connected to the control module and stores the mode excitation parameter sets; and
a second database, which is signal-transmittably connected to the control module and stores the material processing event sets;
wherein the control module further generates a material processing schedule based on a material recipe, an average power, and a total time those are corresponding to the material to be processed;
wherein the control module controls an operating frequency of the signal source and the RF phase and the RF operating power of each of the RF modules according to the material processing schedule, and
the mode excitation parameter sets control the signal source to feed the power signal corresponding to the operating frequency of the signal source to the RF modules, to have the RF modules control the power signal to radiate an energy to a cavity.