US 12,255,259 B2
Optical sensor including planar nano-photonic microlens array and electronic apparatus including the same
Sangeun Mun, Seoul (KR); Junho Lee, Incheon (KR); Sookyoung Roh, Yongin-si (KR); Sungmo Ahn, Yongin-si (KR); and Seokho Yun, Seoul (KR)
Assigned to SAMSUNG ELECTRONICS CO., LTD., Suwon-si (KR)
Filed by SAMSUNG ELECTRONICS CO., LTD., Suwon-si (KR)
Filed on Mar. 22, 2022, as Appl. No. 17/701,019.
Claims priority of application No. 10-2021-0093132 (KR), filed on Jul. 15, 2021.
Prior Publication US 2023/0020980 A1, Jan. 19, 2023
Int. Cl. H01L 31/02 (2006.01); H01L 27/146 (2006.01); H01L 31/0216 (2014.01); H01L 31/0232 (2014.01)
CPC H01L 31/02327 (2013.01) [H01L 27/14627 (2013.01); H01L 31/02162 (2013.01)] 18 Claims
OG exemplary drawing
 
1. An optical sensor comprising:
a sensor substrate comprising a plurality of photosensitive cells;
a filter layer provided on the sensor substrate, and comprising a plurality of filters, each of the plurality of filters being configured to selectively transmit light of a certain wavelength band; and
a planar nano-photonic microlens array provided on the filter layer, and comprising a plurality of planar nano-photonic microlenses, each of the plurality of planar nano-photonic microlenses having a nano-pattern structure that condenses the light onto a corresponding photosensitive cell from among the plurality of photosensitive cells,
wherein the plurality of planar nano-photonic microlenses are two-dimensionally arranged in a first direction and a second direction that is perpendicular to the first direction, and
each of the planar nano-photonic microlenses includes a plurality of nano-structures that are arranged such that the light transmitting through each of the planar nano-photonic microlenses has a phase profile in which a phase change curve is convex in the first direction and the second direction,
wherein the phase profile of the light that has passed through a center portion of the planar nano-photonic microlens array has a symmetrical shape in the first direction and a symmetrical shape in the second direction.