US 12,255,238 B2
Integrated circuit, system and method of forming same
Shih-Wei Peng, Hsinchu (TW); Chih-Min Hsiao, Hsinchu (TW); and Jiann-Tyng Tzeng, Hsinchu (TW)
Assigned to TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., Hsinchu (TW)
Filed by TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., Hsinchu (TW)
Filed on May 6, 2021, as Appl. No. 17/313,576.
Claims priority of provisional application 63/106,090, filed on Oct. 27, 2020.
Prior Publication US 2022/0130968 A1, Apr. 28, 2022
Int. Cl. H01L 23/00 (2006.01); H01L 21/311 (2006.01); H01L 21/768 (2006.01); H01L 23/522 (2006.01); H01L 23/528 (2006.01); H01L 29/40 (2006.01); H01L 29/417 (2006.01)
CPC H01L 29/4175 (2013.01) [H01L 21/31144 (2013.01); H01L 21/76877 (2013.01); H01L 23/5226 (2013.01); H01L 23/5286 (2013.01); H01L 29/401 (2013.01)] 20 Claims
OG exemplary drawing
 
1. An integrated circuit comprising:
a set of power rails extending in a first direction, configured to supply a first supply voltage or a second supply voltage, and being on a first level of a back-side of a substrate;
a set of active regions extending in the first direction, and being on a second level of a front-side of the substrate opposite from the back-side, the second level being different from the first level, and the set of active regions being overlapped by the set of power rails;
a first set of conductive lines extending in a second direction different from the first direction, being on a third level of the back-side of the substrate, the third level being different from the first level and the second level, and overlapping the set of active regions;
a first set of vias between the set of active regions and the first set of conductive lines, the first set of vias electrically coupling the set of active regions to the first set of conductive lines; and
a second set of vias between the first set of conductive lines and the set of power rails, the second set of vias electrically coupling the first set of conductive lines and the set of power rails;
wherein the set of active regions comprises:
a first active region extending in the first direction; and
a second active region extending in the first direction, and being separated from the first active region in the second direction;
wherein the set of power rails comprises:
a first power rail extending in the first direction, configured to supply the first supply voltage to the first active region, and overlapping the first active region; and
a second power rail extending in the first direction, configured to supply the second supply voltage to the second active region, overlapping the second active region, and being separated from the first power rail in the second direction.