US 12,255,221 B2
Microbolometer systems and methods
Eric A. Kurth, Santa Barbara, CA (US); Marin Sigurdson, Goleta, CA (US); and Robert F. Cannata, Santa Barbara, CA (US)
Assigned to Teledyne FLIR Commercial Systems, Inc., Goleta, CA (US)
Filed by Teledyne FLIR Commercial Systems, Inc., Goleta, CA (US)
Filed on Apr. 5, 2024, as Appl. No. 18/628,607.
Application 18/628,607 is a continuation of application No. 17/471,158, filed on Sep. 10, 2021, granted, now 11,955,504.
Application 17/471,158 is a continuation of application No. PCT/US2020/022194, filed on Mar. 11, 2020.
Claims priority of provisional application 62/907,555, filed on Sep. 28, 2019.
Claims priority of provisional application 62/907,548, filed on Sep. 27, 2019.
Claims priority of provisional application 62/816,889, filed on Mar. 11, 2019.
Prior Publication US 2024/0339482 A1, Oct. 10, 2024
Int. Cl. H01L 27/146 (2006.01); G01J 5/00 (2022.01); G01J 5/02 (2022.01); G01J 5/20 (2006.01); G01J 5/24 (2006.01); H04N 5/33 (2023.01); H04N 25/75 (2023.01)
CPC H01L 27/14669 (2013.01) [G01J 5/023 (2013.01); G01J 5/024 (2013.01); G01J 5/20 (2013.01); G01J 5/24 (2013.01); H01L 27/14636 (2013.01); H01L 27/14649 (2013.01); H01L 27/14683 (2013.01); H04N 5/33 (2013.01); H04N 25/75 (2023.01); G01J 2005/0077 (2013.01); G01J 2005/202 (2013.01)] 20 Claims
OG exemplary drawing
 
1. An infrared imaging device comprising:
a substrate comprising a plurality of contacts and a surface, wherein the surface defines a plane;
a microbolometer array coupled to the substrate, wherein the microbolometer array comprises a plurality of microbolometers, and wherein each microbolometer comprises:
a bridge; and
a leg structure coupled to the bridge and to one of the plurality of contacts, wherein the leg structure comprises a conductive layer and a first layer disposed along at least two surfaces of the conductive layer.