| CPC H01L 23/66 (2013.01) [H01L 23/49822 (2013.01); H01L 23/49838 (2013.01); H01P 3/003 (2013.01); H01P 3/08 (2013.01); H01P 3/081 (2013.01); H01L 2223/6627 (2013.01)] | 21 Claims |

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1. A microelectronic support for millimeter-wave communication, comprising:
a millimeter-wave communication transmission line, wherein the transmission line includes a trace in a metal layer, wherein the trace is electrically coupled to a via by a via pad in the metal layer; and
a ground plane in the metal layer, wherein one or more metal portions contact the via pad and the ground plane.
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