US 12,255,098 B2
Carrier substrate and element transfer method using the same
Jae Hyun Kim, Daejeon (KR); Jae Gu Kim, Daejeon (KR); Sang Min Kim, Daejeon (KR); Kwang Seop Kim, Daejeon (KR); Yun Hwangbo, Daejeon (KR); Hak Joo Lee, Daejeon (KR); and Se Jeong Won, Daejeon (KR)
Assigned to CENTER FOR ADVANCED META-MATERIALS, Daejeon (KR)
Filed by CENTER FOR ADVANCED META-MATERIALS, Daejeon (KR)
Filed on May 11, 2022, as Appl. No. 17/741,530.
Application 17/741,530 is a continuation of application No. PCT/KR2020/016058, filed on Nov. 16, 2020.
Claims priority of application No. 10-2019-0146644 (KR), filed on Nov. 15, 2019.
Prior Publication US 2022/0270927 A1, Aug. 25, 2022
Int. Cl. H01L 21/78 (2006.01); B23K 26/18 (2006.01); B23K 26/20 (2014.01); B23K 26/40 (2014.01); B23K 26/50 (2014.01); B23K 101/40 (2006.01)
CPC H01L 21/7813 (2013.01) [B23K 26/18 (2013.01); B23K 26/20 (2013.01); B23K 26/40 (2013.01); B23K 26/50 (2015.10); B23K 2101/40 (2018.08)] 20 Claims
OG exemplary drawing
 
1. A carrier substrate comprising:
a base layer;
an antireflection layer formed on one surface of the base layer and allowing an elastic wave generated by a first laser beam transmitted through an element adhesively bonded to the antireflection layer to be transmitted through the base layer without being reflected towards the element, the first laser beam being applied to the element through a source substrate of the element; and
an energy absorption layer formed between the base layer and the antireflection layer to be aligned with the element, the energy absorption layer evaporating upon energy absorption.