| CPC H01L 21/68707 (2013.01) [B25J 9/044 (2013.01); H01L 21/67167 (2013.01); H01L 21/67742 (2013.01)] | 11 Claims |
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1. A substrate transfer apparatus that transfers a substrate in a vacuum chamber, comprising:
an elevating robot including: a hollow elevating shaft through which an a-th hollow hole is formed, and an elevation driving unit that moves the hollow elevating shaft up-and-down and rotates the hollow elevating shaft, wherein the elevating robot is sealably coupled with a vacuum chamber through-hole formed in a lower region of the vacuum chamber;
a travel robot including: (i) a travel arm, through which a b1-st vertical through-hole is formed on an upper surface thereof and a lower surface thereof at a b-th one-end area thereof and through which a b2-nd vertical through-hole is formed on the upper surface thereof and the lower surface thereof at a b-th opposite-end area thereof, wherein the lower surface faces a ground, wherein an internal slot is formed at inner area of the travel arm than where the b2-nd vertical through-hole is located, wherein the internal slot is separated from the b2-nd vertical through-hole with a partition, wherein a bottom-open-type space that connects the b2-nd vertical through-hole with the internal slot is formed in the travel arm, wherein the bottom-open-type space has a predetermined depth from the lower surface toward the upper surface, and wherein an internal wiring hole that connects the b1-st vertical through-hole with the internal slot is formed in the travel arm, (ii) a b-th driving motor installed in the internal slot of the travel arm, and (iii) a b-th speed reducer installed in the b2-nd vertical through-hole of the travel arm, wherein the b-th speed reducer rotates in conjunction with the b-th driving motor, and wherein a rotation driving shaft thereof with a b-th hollow hole is exposed on the upper surface; wherein the hollow elevating shaft is sealably coupled such that the b1-st vertical through-hole is matched with the a-th hollow hole of the hollow elevating shaft at a first specific lower surface area of the lower surface corresponding to the b1-st vertical through-hole of the b-th one-end area, wherein a b1-st cover is sealably coupled at a first specific upper surface area of the upper surface corresponding to the b1-st vertical through-hole of the b-th one-end area, and wherein a b2-nd cover is sealably coupled at a second specific lower surface area of the lower surface corresponding to the bottom-open-type space of the b-th opposite-end area; and
a substrate transfer robot including: (i) a transfer arm platform including (i-1) a c1-st coupling hole, formed at a c-th center area which is a specific area on a center line corresponding to a linear movement direction of the substrate for transfer, wherein a c1-st stopping member, through which a c1-st vertical through-hole corresponding to the b-th hollow hole of the rotation driving shaft of the b-th speed reducer of the travel robot is formed, compartmentalizes the c1-st coupling hole into a c1-st upper space and a c1-st lower space, wherein the c1-st upper space is sealed by a c1-st cover, (i-2) a c2-nd coupling hole, formed at a c-th one-side area which is a one-side area with respect to the center line, wherein a c2-nd stopping member, through which a c2-nd vertical through-hole is formed, compartmentalize the c2-nd coupling hole into a c2-nd upper space and a c2-nd lower space which is sealed by a c2-nd cover, (i-3) a c3-rd coupling hole, formed at a c-th opposite-side area corresponding to the c-th one-side area at an opposite-side area with respect to the center line, wherein a c3-rd stopping member, through which a c3-rd vertical through-hole is formed, compartmentalizes the c3-rd coupling hole into a c3-rd upper space and a c3-rd lower space which is sealed by a c3-rd cover, (i-4) a (1_1)-st blade and a (1_2)-nd blade formed respectively at a forward part and a backward part of the c2-nd coupling hole, (i-5) a (2_1)-st blade and a (2_2)-nd blade formed respectively at the forward part and the backward part of the c3-rd coupling hole; and wherein the rotation driving shaft of the b-th speed reducer of the travel robot inserted into the c1-st lower space is fixedly coupled with the c1-st stopping member; (ii) a first transfer arm part including a (1_1)-st transfer link arm, a (1_2)-nd transfer link arm, a first common link arm, a (1_1)-st subordinate link arm which is parallel to the (1_1)-st transfer link arm, a (1_2)-nd subordinate link arm which is parallel to the (1_1)-st transfer link arm, a (1_3)-rd subordinate link arm which is parallel to the (1_2)-nd transfer link arm, a (1_4)-th subordinate link arm which is parallel to the first common link arm, and a first end-effector, wherein a c1-st driving motor and a c1-st speed reducer, interlocked with the c1-st driving motor to reduce a rotational speed of the c1-st driving motor by half, are installed in a sealed inner space of the (1_1)-st transfer link arm, wherein a (c1_1)-st hollow driving shaft having a (c1_1)-st hollow hole interlocked with the c1-st speed reducer and a (c1_1)-st output shaft interlocked with the (c1_1)-st hollow driving shaft are sealably installed on a (c1_1)-st one-end area of the (1_1)-st transfer link arm, wherein a (c1_2)-nd hollow driving shaft having a (c1_2)-nd hollow hole interlocked with the c1-st driving motor and a (c1_2)-nd output shaft interlocked with the (c1_2)-nd hollow driving shaft are sealably installed on a (c1_1)-st opposite-end area of the (1_1)-st transfer link arm, wherein the (c1_1)-st output shaft of the (1_1)-st transfer link arm is fixedly coupled with a (2_1)-st linking member that is inserted into the c2-nd upper space of the transfer arm platform, wherein the (2_1)-st linking member is fixedly coupled with the c2-nd stopping member, wherein a (c1_2)-nd one-end area of the (1_2)-nd transfer link arm is fixedly coupled with the (c1-2)-nd output shaft of the (1_1)-st transfer link arm through a first fixed coupling shaft, wherein a c1-st center area of the first common link arm is rotatably coupled with the first fixed coupling shaft, wherein a (c1_4)-th one-end area of the (1_1)-st subordinate link arm is rotatably coupled with the (1_1)-st blade of the transfer arm platform and a (c1_4)-th opposite-end area of the (1_1)-st subordinate link arm is rotatably coupled with a (c1_3)-rd one-end area of the first common link arm, wherein a (c1_5)-th one-side area of the (1_2)-nd subordinate link arm is rotatably coupled with the (1_2)-nd blade of the transform arm platform and a (c1_5)-th opposite-end area of the (1_2)-nd subordinate link arm is rotatably coupled with a (c1_3)-rd opposite-end area of the first common link arm, wherein a (c1_6)-th one-end area of the (1_3)-rd subordinate link arm is rotatably coupled with a (c1_3)-rd opposite-end area of the first common link arm, wherein a (c1_7)-th one-end area of the (1_4)-th subordinate link arm is rotatably coupled with a (c1_6)-th opposite-end area of the (1_3)-nd subordinate link arm and a (c1_7)-th opposite-end area of the (1_4)-th subordinate link arm is rotatably coupled with a (c1_2)-nd opposite-end area of the (1_2)-nd transfer link arm, and wherein the first end-effector is fixed with the (c1_7)-th opposite-end area of the (1_4)-th subordinate link arm to thereby support the substrate; and (iii) a second transfer arm part including a (2_1)-st transfer link arm, a (2_2)-nd transfer link arm, a second common link arm, a (2_1)-st subordinate link arm which is parallel to the (2_1)-st transfer link arm, a (2_2)-nd subordinate link arm which is parallel to the (2_1)-st transfer link arm, a (2_3)-rd subordinate link arm parallel to the (2_2)-nd transfer link arm, a (2_4)-th subordinate link arm parallel to the second common link arm, and a second end-effector, wherein a c2-nd driving motor and a c2-nd speed reducer, interlocked with the c2-nd driving motor to reduce a rotational speed of the c2-nd driving motor by half, are installed in a sealed inner space of the (2_1)-st transfer link arm, wherein a (c2_1)-st hollow driving shaft having a (c2_1)-st hollow hole interlocked with the c2-nd speed reducer and a (c2_1)-st output shaft interlocked with the (c2_1)-st hollow driving shaft are sealably installed on a (c2_1)-st one-end area of the (2_1)-st transfer link arm, wherein a (c2_2)-nd hollow driving shaft having a (c2_2)-nd hollow hole interlocked with the c2-nd driving motor and a (c2_2)-nd output shaft interlocked with the (c2_2)-nd hollow driving shaft are sealably installed on a (c2_1)-st opposite-end area of the (2_1)-st transfer link arm, wherein the (c2_1)-st output shaft of the (2_1)-st transfer link arm is fixedly coupled with a (2_2)-nd linking member that is inserted into the c3-rd upper space of the transfer arm platform, wherein the (2_2)-nd linking member is fixedly coupled with the c3-rd stopping member, wherein a (c2_2)-nd one-end area of the (2_2)-nd transfer link arm is fixedly coupled with the (c2_2)-nd output shaft of the (2_1)-st transfer link arm through a second fixed coupling shaft, wherein a c2-nd center area of the second common link arm is rotatably coupled with the second fixed coupling shaft, wherein a (c2_4)-th one-end area of the (2_1)-st subordinate link arm is rotatably coupled with the (2_1)-st blade of the transfer arm platform and a (c2_4)-th opposite-end area of the (2_1)-st subordinate link arm is rotatably coupled with a (c2_3)-rd one-end area of the second common link arm, wherein a (c2_5)-th one-side area of the (2_2)-nd subordinate link arm is rotatably coupled with the (2_2)-nd blade of the transfer arm platform and a (c2_5)-th opposite-end area of the (2_2)-nd subordinate link arm is rotatably coupled with a (c2_3)-rd opposite-end area of the second common link arm, wherein a (c2_6)-th one-end area of the (2_3)-rd subordinate link arm is rotatably coupled with a (c2_3)-rd opposite-end area of the second common link arm, wherein a (c2_7)-th one-end area of the (2_4)-th subordinate link arm is rotatably coupled with a (c2_6)-th opposite-end area of the (2_3)-nd subordinate link arm and a (c2_7)-th opposite-end area of the (2_4)-th subordinate link arm is rotatably coupled with a (c2_2)-nd opposite-end area of the (2_2)-nd transfer link arm, and wherein the second end-effector is fixed with the (c2_7)-th opposite-end area of the (2_4)-th subordinate link arm to thereby support the substrate.
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