US 12,255,089 B2
Robot apparatus, systems, and methods for transporting substrates in electronic device manufacturing
Jeffrey C. Hudgens, San Francisco, CA (US); and Karuppasamy Muthukamatchi, Madurai (IN)
Assigned to Applied Materials, Inc., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Jun. 24, 2021, as Appl. No. 17/357,719.
Claims priority of application No. 202041028186 (IN), filed on Jul. 2, 2020.
Prior Publication US 2022/0005726 A1, Jan. 6, 2022
Int. Cl. H01L 21/687 (2006.01); B25J 9/00 (2006.01); B25J 17/02 (2006.01); B25J 18/00 (2006.01)
CPC H01L 21/68707 (2013.01) [B25J 9/0084 (2013.01); B25J 17/025 (2013.01); B25J 18/00 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A robot apparatus, comprising:
an arm comprising an inboard end and an outboard end, the inboard end configured to rotate about a shoulder axis;
a first forearm configured for independent rotation relative to the arm about an elbow axis at the outboard end of the arm;
a first wrist member configured for independent rotation relative the first forearm about a first wrist axis at a distal end of the first forearm opposite the elbow axis, wherein the first wrist member comprises a first end effector and a second end effector, and wherein the first wrist member is configured to simultaneously manipulate a first plurality of substrates;
a second forearm configured for independent rotation relative to the arm about the elbow axis;
a second wrist member configured for independent rotation relative the second forearm about a second wrist axis at a distal end of the second forearm opposite the elbow axis, wherein the second wrist member comprises a third end effector and a fourth end effector, and wherein the second wrist member is configured to simultaneously manipulate a second plurality of substrates;
a third forearm configured for independent rotation relative to the arm about the elbow axis; and
a third wrist member configured for independent rotation relative the third forearm about a third wrist axis at a distal end of the third forearm opposite the elbow axis, wherein the third wrist member comprises a fifth end effector and a sixth end effector, wherein the third wrist member is configured to simultaneously manipulate a third plurality of substrates, and wherein a first fixed vertical pitch between the first wrist member and the second wrist member is less than a second fixed vertical pitch between the second wrist member and the third wrist member.