US 12,255,087 B2
Expanding apparatus
Tomohito Matsuda, Tokyo (JP); Yuhei Fujii, Tokyo (JP); Naoya Takesue, Tokyo (JP); and Takayuki Masada, Tokyo (JP)
Assigned to DISCO CORPORATION, Tokyo (JP)
Filed by DISCO CORPORATION, Tokyo (JP)
Filed on Nov. 29, 2022, as Appl. No. 18/071,014.
Claims priority of application No. 2021-194780 (JP), filed on Nov. 30, 2021; and application No. 2022-171425 (JP), filed on Oct. 26, 2022.
Prior Publication US 2023/0170246 A1, Jun. 1, 2023
Int. Cl. H01L 21/683 (2006.01)
CPC H01L 21/6836 (2013.01) 3 Claims
OG exemplary drawing
 
1. An expanding apparatus that expands a sheet of a workpiece unit including a workpiece, the sheet stuck to the workpiece, and an annular frame to which an outer circumferential side of the sheet is stuck, the expanding apparatus comprising:
a frame fixing part that fixes the annular frame of the workpiece unit;
a holding table that holds the workpiece;
an expanding unit that expands the sheet;
a heating unit that heats the sheet between an outer circumferential side of the workpiece and an inner circumferential edge of the annular frame; and
a cover that covers the workpiece held on the holding table,
wherein the cover covers the workpiece when the sheet is heated by the heating unit.