US 12,255,085 B2
Wafer holder and operating method of the same
Xudong Zhu, Suzhou (CN)
Assigned to INNOSCIENCE (SUZHOU) SEMICONDUCTOR CO., LTD., Suzhou (CN)
Appl. No. 17/788,734
Filed by INNOSCIENCE (SUZHOU) SEMICONDUCTOR CO., LTD., Suzhou (CN)
PCT Filed Mar. 10, 2022, PCT No. PCT/CN2022/080207
§ 371(c)(1), (2) Date Jun. 23, 2022,
PCT Pub. No. WO2023/168663, PCT Pub. Date Sep. 14, 2023.
Prior Publication US 2024/0170316 A1, May 23, 2024
Int. Cl. H01L 21/68 (2006.01); H01L 21/673 (2006.01)
CPC H01L 21/68 (2013.01) [H01L 21/67346 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A wafer holder, comprising:
a carrier plate comprising:
a base having a carrier surface; and
a guiding structure surrounding the base; and
a plurality of blocking devices coupled to the carrier plate through the guiding structure,
wherein the blocking devices are configured to move along the guiding structure, and each of the blocking devices has a curved wall, and the curved walls at least partially surrounds an area above the carrier surface.