US 12,255,084 B2
Handle for wafer carrier
Jason T. Steffens, Shakopee, MN (US); Mark V. Smith, Colorado Springs, CO (US); and Matthew A. Fuller, Colorado Springs, CO (US)
Assigned to ENTEGRIS, INC., Billerica, MA (US)
Appl. No. 17/613,418
Filed by ENTEGRIS, INC., Billerica, MA (US)
PCT Filed May 20, 2020, PCT No. PCT/US2020/033784
§ 371(c)(1), (2) Date Nov. 22, 2021,
PCT Pub. No. WO2020/236923, PCT Pub. Date Nov. 26, 2020.
Claims priority of provisional application 62/851,983, filed on May 23, 2019.
Prior Publication US 2022/0230900 A1, Jul. 21, 2022
Int. Cl. H01L 21/673 (2006.01)
CPC H01L 21/67373 (2013.01) [H01L 21/67379 (2013.01); H01L 21/67386 (2013.01)] 16 Claims
OG exemplary drawing
 
1. A handle for a wafer carrier, the wafer carrier including a protrusion extending from an outer surface of the wafer carrier, the protrusion defining an aperture between the outer surface of the wafer carrier and an extent of the protrusion for attaching the handle, the handle comprising:
a body including:
a first end and a second end opposite the first end, and
an insertable member disposed between the first end and the second end of the body and configured to be inserted into the aperture to secure the handle to the wafer carrier, the insertable member including a tab that retains the insertable member in the aperture when in an engaged state;
a locking mechanism moveable relative to the insertable member between a locked state and an unlocked state, the locking mechanism including a flexible extension, and in the locked state, the locking mechanism limits flexion of the insertable member and limits the movement of the tab and the flexible extension positioned in the aperture preventing an external force being placed on the locking mechanism in the locked state
wherein the body includes a guide disposed in the body adjacent to the insertable member, the locking mechanism retained by the guide such that the locking mechanism is slidably attached to the body.
 
13. A wafer carrier comprising:
an outer surface;
a protrusion extending from the outer surface, the protrusion defining an aperture between the outer surface and an extent of the protrusion;
a handle attached to the outer surface via the aperture, the handle including:
a body including a first end, a second end opposite the first end, and an insertable member disposed between the first end and the second end and extending into the aperture to secure the handle to the outer surface, the insertable member including a tab that retains the insertable member in the aperture when in an engaged state; and
a locking mechanism moveable relative to the insertable member between a locked state and an unlocked state, the locking mechanism including a flexible extension, and when in the locked state, the locking mechanism limits flexion of the insertable member and limiting the movement of the tab and the flexible extension is positioned in the aperture preventing an external force being placed on the locking mechanism in the locked state
wherein the body includes a guide disposed in the body adjacent to the insertable member, the locking mechanism retained by the guide such that the locking mechanism is slidably attached to the body.