US 12,255,050 B2
Antenna member and apparatus for treating substrate
Yoon Seok Choi, Suwon-si (KR); Yun Sang Kim, Seongnam-si (KR); and Sun Wook Jung, Hwaseong-si (KR)
Assigned to Semes Co., Ltd., Chungcheongnam-do (KR)
Filed by SEMES CO., LTD., Cheonan-si (KR)
Filed on Oct. 18, 2022, as Appl. No. 17/968,179.
Claims priority of application No. 10-2021-0139990 (KR), filed on Oct. 20, 2021.
Prior Publication US 2023/0124184 A1, Apr. 20, 2023
Int. Cl. H01J 37/32 (2006.01); H01L 21/683 (2006.01); H01Q 7/00 (2006.01)
CPC H01J 37/3211 (2013.01) [H01J 37/32119 (2013.01); H01L 21/6831 (2013.01); H01Q 7/00 (2013.01)] 18 Claims
OG exemplary drawing
 
1. An antenna member comprising a first coil and a second coil which have a rotational symmetry to each other, and
wherein the first coil includes a first supply terminal applied with a current and a first ground terminal connected to the ground, the second coil includes a second supply terminal applied with the current and a second ground terminal connected to the ground, and
wherein the first coil and the second coil each include a first portion having an arc-shape and a second portion having an arc-shape which as a whole form one winding,
when seen from a side, the second portion has a relatively lower height than the first portion,
the second portion of the second coil is positioned below the first portion of the first coil, and the second portion of the first coil is positioned below the first portion of the second coil, and
wherein a central angle of the first portion and the second portion is 180°.
 
10. A substrate treating apparatus comprising:
a chamber providing a treating space;
a chuck member provided at the treating space and supporting a substrate;
a window positioned above the chuck member; and
an antenna member positioned above the window, and
wherein the antenna member includes a first coil and a second coil which have a rotational symmetry to each other, and
wherein the first coil includes a first supply terminal applied with a current and a first ground terminal connected to the ground, the second coil includes a second supply terminal applied with the current and a second ground terminal connected to the ground, and
wherein the first coil and the second coil each include a first portion having an arc-shape and a second portion having an arc-shape which as a whole form one winding,
when seen from a side, the second portion has a relatively lower height than the first portion,
the second portion of the second coil is positioned below the first portion of the first coil, and the second portion of the first coil is positioned below the first portion of the second coil, and
wherein a central angle of the first portion and the second portion is 180°.