US 12,255,048 B2
Apparatus to control ion energy
Victor Brouk, Fort Collins, CO (US); and Randy Heckman, Fort Collins, CO (US)
Assigned to Advanced Energy Industries, Inc., Denver, CO (US)
Filed by Advanced Energy Industries, Inc., Denver, CO (US)
Filed on Oct. 26, 2023, as Appl. No. 18/495,452.
Application 18/495,452 is a continuation of application No. 17/245,825, filed on Apr. 30, 2021.
Application 17/245,825 is a continuation of application No. 15/667,239, filed on Aug. 2, 2017, granted, now 11,011,349, issued on May 18, 2021.
Application 15/667,239 is a continuation of application No. 13/596,976, filed on Aug. 28, 2012, granted, now 9,767,988, issued on Sep. 19, 2017.
Application 13/596,976 is a continuation in part of application No. 13/193,299, filed on Jul. 28, 2011, granted, now 9,435,029, issued on Sep. 6, 2016.
Application 13/193,299 is a continuation in part of application No. 12/870,837, filed on Aug. 29, 2010, granted, now 9,287,086, issued on Mar. 15, 2016.
Application 12/870,837 is a continuation in part of application No. 12/767,775, filed on Apr. 26, 2010, granted, now 9,287,092, issued on Mar. 15, 2016.
Claims priority of provisional application 61/174,937, filed on May 1, 2009.
Prior Publication US 2024/0055225 A1, Feb. 15, 2024
Int. Cl. H01L 21/306 (2006.01); C23C 14/34 (2006.01); H01J 37/32 (2006.01)
CPC H01J 37/32009 (2013.01) [C23C 14/345 (2013.01); H01J 37/32091 (2013.01); H01J 37/32137 (2013.01); H01J 37/32146 (2013.01); H01J 37/32174 (2013.01); H01J 37/32935 (2013.01); H01J 37/3299 (2013.01)] 11 Claims
OG exemplary drawing
 
1. An apparatus to control ion energy, the apparatus comprising:
a first node to couple to a substrate support for a substrate;
a power supply coupled to a second node, the power supply configured to provide a DC voltage to set an ion-energy at a surface of the substrate;
a first switch that couples the second node to the first node, and responsive to the first switch being closed, a first voltage is applied at the first node;
a second switch that couples a third node to the first node, and responsive to the second switch being closed, a second voltage is applied at the first node to effectuate a negative voltage at the surface of the substrate; and a controller configured to open the second switch before the first switch is closed and open the first switch before the second switch is closed to produce a waveform at the substrate support.