US 12,255,045 B2
Transmission charged particle microscope with an electron energy loss spectroscopy detector
Peter Christiaan Tiemeijer, Eindhoven (NL)
Assigned to FEI Company, Hillsboro, OR (US)
Filed by FEI Company, Hillsboro, OR (US)
Filed on Apr. 8, 2024, as Appl. No. 18/629,633.
Application 18/629,633 is a division of application No. 17/214,719, filed on Mar. 26, 2021, granted, now 11,955,310.
Claims priority of application No. 20167235 (EP), filed on Mar. 31, 2020.
Prior Publication US 2024/0258067 A1, Aug. 1, 2024
Int. Cl. H01J 37/28 (2006.01); H01J 37/10 (2006.01); H01J 37/147 (2006.01); H01J 37/20 (2006.01); H01J 37/26 (2006.01)
CPC H01J 37/28 (2013.01) [H01J 37/10 (2013.01); H01J 37/1474 (2013.01); H01J 37/20 (2013.01); H01J 37/265 (2013.01); H01J 2237/24485 (2013.01); H01J 2237/2802 (2013.01); H01J 2237/31749 (2013.01)] 9 Claims
OG exemplary drawing
 
1. A transmission charged particle microscope comprising:
a charged particle beam source for emitting a charged particle beam;
a sample holder for holding a sample;
an illuminator for directing the charged particle beam emitted from the charged particle beam source onto the sample;
a projecting system for forming and imaging a diffraction pattern of the sample at a first magnification, wherein said projecting system comprises at least a final projector lens;
an Electron Energy-Loss Spectroscopy detector; and
a control unit for controlling operations of the transmission charged particle microscope;
wherein the transmission charged particle microscope is arranged for operating in at least two modes that substantially yield said first magnification whilst keeping said diffraction pattern substantially in focus, wherein said at least two modes comprise:
a first mode having first settings of said final projector lens; and
a second mode having second settings of said final projector lens.