US 12,253,834 B2
Information processing device, determination method, molding defect inspection device, molding device, and method for manufacturing product
Yuki Samejima, Tokyo (JP); and Akihiko Kawamura, Tokyo (JP)
Assigned to CANON KABUSHIKI KAISHA, Tokyo (JP)
Filed by CANON KABUSHIKI KAISHA, Tokyo (JP)
Filed on Jul. 9, 2021, as Appl. No. 17/371,547.
Claims priority of application No. 2020-121136 (JP), filed on Jul. 15, 2020.
Prior Publication US 2022/0019180 A1, Jan. 20, 2022
Int. Cl. G05B 13/02 (2006.01); G03F 7/00 (2006.01)
CPC G05B 13/0265 (2013.01) [G03F 7/0002 (2013.01)] 22 Claims
OG exemplary drawing
 
1. An information processing device for determining necessity/non-necessity of adjusting inspection conditions for performing an inspection for molding defects of a molded composition on a substrate performed with a molding process of molding the composition on the substrate using a mold, the information processing device comprising:
a memory storing instructions; and
at least one processor that implements the instructions to:
acquire an image of the molded composition on a reference substrate already performed with the molding process and that includes a known molding defect by capturing the reference substrate;
inspect the acquired image using a learned machine learning model for the molding defects in the molded composition;
compare an inspection result of the inspection with information relating to the known molding defect of the reference substrate; and
determine the necessity/non-necessity of adjusting the inspection conditions of the learned machine learning model based on a comparison result of the comparison.