US 12,253,807 B2
Height measurement method and height measurement system
Andrey Valerievich Rogachevskiy, Den Bosch (NL); Bastiaan Andreas Wilhelmus Hubertus Knarren, Nederweert-Eind (NL); Doru Cristian Torumba, Veldhoven (NL); Arjan Gijsbertsen, Vught (NL); Cristina Caresio, Eindhoven (NL); Raymund Centeno, Nijmegen (NL); Tabitha Wangari Kinyanjui, Heumen (NL); and Jan Arie Den Boer, Strijen (NL)
Assigned to ASML NETHERLANDS B.V., Veldhoven (NL)
Appl. No. 18/000,299
Filed by ASML Netherlands B.V., Veldhoven (NL)
PCT Filed Apr. 19, 2021, PCT No. PCT/EP2021/060040
§ 371(c)(1), (2) Date Nov. 30, 2022,
PCT Pub. No. WO2021/249682, PCT Pub. Date Dec. 16, 2021.
Claims priority of application No. 20179379 (EP), filed on Jun. 10, 2020.
Prior Publication US 2023/0244153 A1, Aug. 3, 2023
Int. Cl. G03F 9/00 (2006.01); G01C 5/00 (2006.01); G06T 7/246 (2017.01)
CPC G03F 9/7034 (2013.01) [G01C 5/00 (2013.01); G03F 9/7026 (2013.01); G03F 9/7046 (2013.01); G03F 9/7092 (2013.01); G06T 7/246 (2017.01); G03F 9/7019 (2013.01)] 6 Claims
OG exemplary drawing
 
1. A method comprising:
sampling a first substrate using a height level sensor with the first substrate moving with a first velocity, the first velocity being a first at least partially non-constant velocity of the first substrate with respect to the height level sensor, to generate a first height level data;
generating a first height map based on the first height level data; and
calculating a corrected substrate height map by subtracting a correction map from the first height map, wherein the correction map is calculated from a difference between a first velocity height map and a second velocity height map.