| CPC G03F 7/0002 (2013.01) [C08K 3/22 (2013.01); C08K 2003/2241 (2013.01); C08K 2201/005 (2013.01); C08K 2201/011 (2013.01)] | 20 Claims |

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1. A photo nanoimprint lithography (P-NIL) resin comprising:
a cross-linkable organic binder;
solvent based inorganic nanoparticles dispersed in the P-NIL resin; and
a solvent configured to be evaporated;
the P-NIL resin having a viscosity in the range of 4,000 to 6,000 centipoise at 25° C. after the solvent is evaporated prior to curing the P-NIL resin; and
the P-NIL resin having a refractive index of greater than 1.6 at 589 nm and glass transition temperature of greater than 50° C. after curing by a photo initiator.
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