US 12,253,668 B2
Two-axis scanning mirror using piezoelectric drivers and looped torsion springs
Youmin Wang, Berkeley, CA (US); Yufeng Wang, Mountain View, CA (US); Kong Yin Ho, Mountain View, CA (US); and Gary Li, Mountain View, CA (US)
Assigned to BEIJING VOYAGER TECHNOLOGY CO., LTD., Beijing (CN)
Filed by BEIJING VOYAGER TECHNOLOGY CO., LTD., Beijing (CN)
Filed on Dec. 30, 2021, as Appl. No. 17/566,011.
Application 17/566,011 is a continuation in part of application No. 17/562,799, filed on Dec. 27, 2021.
Prior Publication US 2023/0204944 A1, Jun. 29, 2023
Int. Cl. G02B 26/08 (2006.01); G02B 26/10 (2006.01)
CPC G02B 26/0858 (2013.01) [G02B 26/101 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A scanning mirror assembly, comprising:
a two-dimensional micro-electromechanical system (MEMS) scanning mirror;
a first pair of piezoelectric electrodes coupled to the MEMS scanning mirror through a first pair of looped torsion springs, wherein the first pair of piezoelectric electrodes drives the MEMS scanning mirror to rotate around a first axis; and
a second pair of piezoelectric electrodes coupled to the MEMS scanning mirror through a second pair of looped torsion springs, wherein the second pair of piezoelectric electrodes drives the MEMS scanning mirror to rotate around a second axis orthogonal to the first axis,
wherein at least one of the first pair of looped torsion springs or the second pair of looped torsion springs are multiple-looped torsion springs.