US 12,253,505 B2
Contact combustion type hydrogen sensor and method for manufacturing same
Il Seon Yoo, Suwon-si (KR); Hyun Soo Kim, Yongin-si (KR); Jang Hyeon Lee, Gunpo-si (KR); Dong Gu Kim, Suwon-si (KR); and Dae Sung Kwon, Seoul (KR)
Assigned to Hyundai Motor Company, Seoul (KR); and Kia Corporation, Seoul (KR)
Filed by Hyundai Motor Company, Seoul (KR); and Kia Corporation, Seoul (KR)
Filed on May 12, 2022, as Appl. No. 17/742,659.
Claims priority of application No. 10-2021-0100188 (KR), filed on Jul. 29, 2021.
Prior Publication US 2023/0034945 A1, Feb. 2, 2023
Int. Cl. G01N 33/00 (2006.01); G01N 27/16 (2006.01)
CPC G01N 33/005 (2013.01) [G01N 27/16 (2013.01)] 17 Claims
OG exemplary drawing
 
1. A contact combustion type hydrogen sensor, the sensor comprising:
a substrate comprising silicon;
lamination layers disposed over a top surface of the substrate, the lamination layers comprising a first thin oxide layer on the top surface of the substrate and a first thin nitride layer over a top surface of the first thin oxide layer;
a heater disposed over the lamination layers, the heater comprising a connecting part electrically connected to a predetermined part and a heating part configured to be heated in response to power being applied;
insulating layers covering a top surface of the heater, the insulating layers comprising a second thin oxide layer on the top surface of the heater and a second thin nitride layer on a top surface of the second thin oxide layer;
a platinum catalyst having a shape of a circle over the insulating layers and configured to be heated by the heater to perform a hydrogen reaction;
a slit outside the heating part and passing through the substrate and the lamination layers; and
a through hole vertically penetrating through the substrate and the first thin oxide layer;
wherein the heater is formed in a linear shape;
wherein the heater comprises the connecting part on each of opposite ends of the heater electrically connected to the predetermined part, and the heating part on a middle portion of the heater;
wherein the heating part is formed such that an outer portion of the heating part is formed in a shape of a circle and a pattern is formed inside the circle; and
wherein the slit is formed in a circular shape on an outside to surround the shape of the circle of the heating part and the platinum catalyst.