US 12,253,458 B2
Dryness detection method and dryness detection apparatus
Yoshinobu Saito, Tokyo (JP)
Assigned to DISCO CORPORATION, Tokyo (JP)
Filed by DISCO CORPORATION, Tokyo (JP)
Filed on Nov. 2, 2022, as Appl. No. 18/052,023.
Claims priority of application No. 2021-183365 (JP), filed on Nov. 10, 2021.
Prior Publication US 2023/0296498 A1, Sep. 21, 2023
Int. Cl. G01N 21/25 (2006.01); G01N 21/17 (2006.01); G01N 21/84 (2006.01)
CPC G01N 21/255 (2013.01) [G01N 2021/1742 (2013.01); G01N 2021/1748 (2013.01); G01N 2021/8472 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A dryness detection method of detecting dryness of a liquid resin composition containing a solvent, the method comprising:
a wavelength selection step of selecting a light absorption wavelength of the solvent,
a light source selection step of selecting a light source that emits light including light of the selected wavelength;
a light receiving step of applying the light that has been emitted from the light source to the liquid resin composition, and a photodetector receiving light that has passed through the liquid resin composition, and
a controller performing a determination step of finding whether or not the light of the selected wavelength after absorption in the solvent in the light receiving step exceeds in quantity a predetermined threshold, and if the threshold is found to be exceeded, determining that the solvent has evaporated and the liquid resin composition has dried.